Assignee
TILSCH MARKUS K
US·2 granted patents·28 citations·filing 2005–2008
Top patents by PatentIndex Score
2 records- 0192US8163144B2Magnetron sputtering deviceTILSCH MARKUS K·Filed 2005·Granted Apr 24, 2012·26 cites·22 claims
- 0268US8864958B2Method and sputter-deposition system for depositing a layer composed of a mixture of materials and having a predetermined refractive indexTILSCH MARKUS K·Filed 2008·Granted Oct 21, 2014·2 cites·6 claims
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