Assignee
TMA TECHNOLOGIES INC
US·3 granted patents·147 citations·filing 1990–1994
Top patents by PatentIndex Score
3 records- 0182US5416590AApparatus and process for measuring gap and mismatchTMA TECHNOLOGIES INC·Filed 1993·Granted May 16, 1995·57 cites·36 claims
- 0277US5196906AModular scatterometer with interchangeable scanning headsTMA TECHNOLOGIES INC·Filed 1990·Granted Mar 23, 1993·59 cites·19 claims
- 0367US5596403ASystem and method for measuring angular positionTMA TECHNOLOGIES INC·Filed 1994·Granted Jan 21, 1997·31 cites·23 claims
Counts cover granted patents and pending applications in the PatentIndex corpus. How scoring works →