Assignee
TOKIMITSU TAKUMI
JP·2 granted patents·2 pending applications·4 citations·filing 2007–2012
Top patents by PatentIndex Score
4 records- 0157US8179520B2Optical element, projection optical system, exposure apparatus, and device fabrication methodTOKIMITSU TAKUMI·Filed 2009·Granted May 15, 2012·2 cites·12 claims
- 0256US8797542B2Measurement apparatusTOKIMITSU TAKUMI·Filed 2011·Granted Aug 5, 2014·2 cites·7 claims
- 0337US2007246356A1Sputtering apparatusTOKIMITSU TAKUMI·Filed 2007·Application pending·0 cites
- 0429US2013070256A1Measuring apparatusTOKIMITSU TAKUMI·Filed 2012·Application pending·0 cites
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