Assignee
TOKYO ELECTON LTD
JP·2 granted patents·12 pending applications·27 citations·filing 2004–2024
Top patents by PatentIndex Score
14 records- 0189US7713758B2Method and apparatus for optimizing a gate channelTOKYO ELECTON LTD·Filed 2007·Granted May 11, 2010·22 cites·20 claims
- 0278US9165797B2Liquid processing apparatus, liquid processing method, and storage mediumTOKYO ELECTON LTD·Filed 2013·Granted Oct 20, 2015·5 cites·8 claims
- 0363US2025216790A1Materials and methods for forming patterned mask on substrateTOKYO ELECTON LTD·Filed 2024·Application pending·0 cites
- 0456US2008302761A1Plasma processing system and use thereofTOKYO ELECTON LTD·Filed 2008·Application pending·0 cites
- 0555US2010040980A1Method and apparatus for reforming film and controlling slimming amount thereofTOKYO ELECTON LTD·Filed 2009·Application pending·0 cites
- 0654US2009239360A1Semiconductor device manufacturing apparatus and methodTOKYO ELECTON LTD·Filed 2009·Application pending·0 cites
- 0747US2010029086A1Method for manufacturing semiconductor device and storage mediumTOKYO ELECTON LTD·Filed 2009·Application pending·0 cites
- 0844US2010051613A1Mounting table structure and processing apparatus using the sameTOKYO ELECTON LTD·Filed 2009·Application pending·0 cites
- 0944US2008069669A1Substrate processing device, method of adjusting pressure in substrate processing device, and method of executing charge neutralization processing on mounting table of substrate processing deviceTOKYO ELECTON LTD·Filed 2007·Application pending·0 cites
- 1043US2007125491A1Method of removing particle on substrate, apparatus therefor, and coating and development apparatusTOKYO ELECTON LTD·Filed 2006·Application pending·0 cites
- 1140US2006225656A1Plasma processing apparatus, slot antenna and plasma processing methodTOKYO ELECTON LTD·Filed 2006·Application pending·0 cites
- 1238US2006192505A1Bellows-supporting structure and movable stage deviceTOKYO ELECTON LTD·Filed 2004·Application pending·0 cites
- 1336US2006169209A1Substrate processing apparatus, substrate processing method, and storage medium storing program for implementing the methodTOKYO ELECTON LTD·Filed 2006·Application pending·0 cites
- 1428US2008281625A1Substrate processing apparatus, license management program, license information serving apparatus, license information providing program, license management system, and recording mediumTOKYO ELECTON LTD·Filed 2008·Application pending·0 cites
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