Assignee
TOKYO ELECTRONIC LTD
JP·2 granted patents·2 pending applications·43 citations·filing 1999–2022
Top patents by PatentIndex Score
4 records- 0172US7629557B2Heat treatment apparatus using a lamp for rapidly and uniformly heating a waferTOKYO ELECTRONIC LTD·Filed 2005·Granted Dec 8, 2009·3 cites·5 claims
- 0270US6471782B1Precursor deposition using ultrasonic nebulizerTOKYO ELECTRONIC LTD·Filed 1999·Granted Oct 29, 2002·40 cites·11 claims
- 0350US2024367129A1Feedstock supply deviceTOKYO ELECTRONIC LTD·Filed 2022·Application pending·0 cites
- 0441US2014295675A1Silicon oxide film forming method and silicon oxide film forming apparatusTOKYO ELECTRONIC LTD·Filed 2014·Application pending·0 cites
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