Assignee
TOKYO OHTA KOGYO CO LTD
JP·1 granted patent·2 pending applications·18 citations·filing 1993–2013
Top patents by PatentIndex Score
3 records- 0162US5985525ADeveloper solution for photoresist compositionTOKYO OHTA KOGYO CO LTD·Filed 1993·Granted Nov 16, 1999·18 cites·9 claims
- 0239US2013337387A1Resist composition and method of forming resist patternTOKYO OHTA KOGYO CO LTD·Filed 2013·Application pending·0 cites
- 0333US2014363903A1Substrate treating apparatus and method of treating substrateTOKYO OHTA KOGYO CO LTD·Filed 2013·Application pending·0 cites
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