Assignee
TOPPAN PHOTOMASKS INC
US·14 granted patents·348 citations·filing 2001–2010
Top patents by PatentIndex Score
14 records- 0196US6978437B1Photomask for eliminating antenna effects in an integrated circuit and integrated circuit manufacture with sameTOPPAN PHOTOMASKS INC·Filed 2003·Granted Dec 20, 2005·286 cites·22 claims
- 0286US7531275B2Photomask assembly and method for protecting the same from contaminants generated during a lithography processTOPPAN PHOTOMASKS INC·Filed 2006·Granted May 12, 2009·9 cites·24 claims
- 0377US8347793B2Apparatus for transport of equipment and method for manufacture thereofTOPPAN PHOTOMASKS INC·Filed 2010·Granted Jan 8, 2013·6 cites·33 claims
- 0474US7271950B1Apparatus and method for optimizing a pellicle for off-axis transmission of lightTOPPAN PHOTOMASKS INC·Filed 2001·Granted Sep 18, 2007·14 cites·21 claims
- 0571US7398509B2Network-based photomask data entry interface and instruction generator for manufacturing photomasksTOPPAN PHOTOMASKS INC·Filed 2005·Granted Jul 8, 2008·3 cites·24 claims
- 0669US7094505B2Photomask assembly and method for protecting the same from contaminants generated during a lithography processTOPPAN PHOTOMASKS INC·Filed 2003·Granted Aug 22, 2006·9 cites·34 claims
- 0767US6924071B1Photomask and method for reducing exposure times of high density patterns on the sameTOPPAN PHOTOMASKS INC·Filed 2001·Granted Aug 2, 2005·9 cites·23 claims
- 0866US6968530B2Network-based photomask data entry interface and instruction generator for manufacturing photomasksTOPPAN PHOTOMASKS INC·Filed 2003·Granted Nov 22, 2005·3 cites·27 claims
- 0964US7425393B2Phase shift photomask and method for improving printability of a structure on a waferTOPPAN PHOTOMASKS INC·Filed 2006·Granted Sep 16, 2008·5 cites·23 claims
- 1051US7663156B2Method and apparatus for calibrating a metrology toolTOPPAN PHOTOMASKS INC·Filed 2006·Granted Feb 16, 2010·0 cites·19 claims
- 1151US7277159B2System and method for automatically mounting a pellicle assembly on a photomaskTOPPAN PHOTOMASKS INC·Filed 2006·Granted Oct 2, 2007·2 cites·31 claims
- 1250US7906350B2Method for calibrating a metrology toolTOPPAN PHOTOMASKS INC·Filed 2010·Granted Mar 15, 2011·0 cites·6 claims
- 1340US6910203B2Photomask and method for qualifying the same with a prototype specificationTOPPAN PHOTOMASKS INC·Filed 2002·Granted Jun 21, 2005·2 cites·7 claims
- 1438US7056623B2Photomask and method for manufacturing the sameTOPPAN PHOTOMASKS INC·Filed 2003·Granted Jun 6, 2006·0 cites·23 claims
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Counts cover granted patents and pending applications in the PatentIndex corpus. How scoring works →