Assignee
TOSHIMA TAKAYUKI
JP·6 granted patents·16 citations·filing 2009–2011
Top patents by PatentIndex Score
6 records- 0182US8434423B2Substrate carrying apparatus having circumferential sidewall and substrate processing systemTOSHIMA TAKAYUKI·Filed 2010·Granted May 7, 2013·6 cites·6 claims
- 0280US8465596B2Supercritical processing apparatus and supercritical processing methodTOSHIMA TAKAYUKI·Filed 2011·Granted Jun 18, 2013·5 cites·9 claims
- 0373US8235061B2Substrate processing apparatus and substrate processing methodTOSHIMA TAKAYUKI·Filed 2010·Granted Aug 7, 2012·3 cites·15 claims
- 0467US9076643B2Supercritical processing apparatus, substrate processing system and supercritical processing methodTOSHIMA TAKAYUKI·Filed 2010·Granted Jul 7, 2015·2 cites·8 claims
- 0549US8206785B2Cap metal forming methodTOSHIMA TAKAYUKI·Filed 2009·Granted Jun 26, 2012·0 cites·5 claims
- 0642US9236280B2Substrate processing apparatus, substrate processing method, and storage mediumTOSHIMA TAKAYUKI·Filed 2011·Granted Jan 12, 2016·0 cites·15 claims
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