Assignee
TOSOH SMD INC
US·67 granted patents·39 pending applications·2,232 citations·filing 1987–2025
Top patents by PatentIndex Score
106 records- 0198US6071389ADiffusion bonded sputter target assembly and method of makingTOSOH SMD INC·Filed 1999·Granted Jun 6, 2000·181 cites·10 claims
- 0295US5234487AMethod of producing tungsten-titanium sputter targets and targets produced therebyTOSOH SMD INC·Filed 1991·Granted Aug 10, 1993·67 cites·18 claims
- 0394US6619537B1Diffusion bonding of copper sputtering targets to backing plates using nickel alloy interlayersTOSOH SMD INC·Filed 2001·Granted Sep 16, 2003·83 cites·10 claims
- 0492US5397050AMethod of bonding tungsten titanium sputter targets to titanium plates and target assemblies produced therebyTOSOH SMD INC·Filed 1993·Granted Mar 14, 1995·101 cites·10 claims
- 0591US6840427B2Method of manufacturing sputter targets with internal cooling channelsTOSOH SMD INC·Filed 2001·Granted Jan 11, 2005·46 cites·20 claims
- 0691US6749103B1Low temperature sputter target bonding method and target assemblies produced therebyTOSOH SMD INC·Filed 1999·Granted Jun 15, 2004·108 cites·45 claims
- 0791US5522535AMethods and structural combinations providing for backing plate reuse in sputter target/backing plate assembliesTOSOH SMD INC·Filed 1994·Granted Jun 4, 1996·81 cites·29 claims
- 0891US5230459AMethod of bonding a sputter target-backing plate assembly assemblies produced therebyTOSOH SMD INC·Filed 1992·Granted Jul 27, 1993·118 cites·16 claims
- 0990US6872284B2Target and method of optimizing target profileTOSOH SMD INC·Filed 2002·Granted Mar 29, 2005·42 cites·19 claims
- 1089US6725522B1Method of assembling target and backing platesTOSOH SMD INC·Filed 2000·Granted Apr 27, 2004·45 cites·18 claims
- 1189US5282943AMethod of bonding a titanium containing sputter target to a backing plate and bonded target/backing plate assemblies produced therebyTOSOH SMD INC·Filed 1992·Granted Feb 1, 1994·69 cites·8 claims
- 1287US7063773B2High purity sputter targets with target end-of-life indication and method of manufactureTOSOH SMD INC·Filed 2001·Granted Jun 20, 2006·26 cites·14 claims
- 1387US6183686B1Sputter target assembly having a metal-matrix-composite backing plate and methods of making sameTOSOH SMD INC·Filed 1999·Granted Feb 6, 2001·97 cites·8 claims
- 1486US7922881B2Sputtering target with an insulating ring and a gap between the ring and the targetTOSOH SMD INC·Filed 2006·Granted Apr 12, 2011·9 cites·8 claims
- 1586US6955852B2Method of manufacturing sputter targets with internal cooling channelsTOSOH SMD INC·Filed 2004·Granted Oct 18, 2005·25 cites·4 claims
- 1686US6579431B1Diffusion bonding of high purity metals and metal alloys to aluminum backing plates using nickel or nickel alloy interlayersTOSOH SMD INC·Filed 1999·Granted Jun 17, 2003·79 cites·26 claims
- 1785US7114643B2Friction fit target assembly for high power sputtering operationTOSOH SMD INC·Filed 2001·Granted Oct 3, 2006·37 cites·9 claims
- 1885US5593082AMethods of bonding targets to backing plate members using solder pastes and target/backing plate assemblies bonded therebyTOSOH SMD INC·Filed 1994·Granted Jan 14, 1997·51 cites·29 claims
- 1984US6193821B1Fine grain tantalum sputtering target and fabrication processTOSOH SMD INC·Filed 1999·Granted Feb 27, 2001·78 cites·29 claims
- 2084US5269899ACathode assembly for cathodic sputtering apparatusTOSOH SMD INC·Filed 1992·Granted Dec 14, 1993·59 cites·15 claims
- 2183US7561937B2Automated sputtering target productionTOSOH SMD INC·Filed 2006·Granted Jul 14, 2009·15 cites·38 claims
- 2283US6521108B1Diffusion bonded sputter target assembly and method of making sameTOSOH SMD INC·Filed 1999·Granted Feb 18, 2003·47 cites·16 claims
- 2383US5342496AMethod of welding sputtering target/backing plate assembliesTOSOH SMD INC·Filed 1993·Granted Aug 30, 1994·51 cites·21 claims
- 2483US5009765ASputter target designTOSOH SMD INC·Filed 1990·Granted Apr 23, 1991·77 cites·20 claims
- 2582US11062889B2Method of production of uniform metal plates and sputtering targets made therebyTOSOH SMD INC·Filed 2018·Granted Jul 13, 2021·2 cites·11 claims
- 2682US6774339B1Hermetic sealing of target/backing plate assemblies using electron beam melted indium or tinTOSOH SMD INC·Filed 2000·Granted Aug 10, 2004·27 cites·17 claims
- 2782US6419806B1Insert target assembly and method of making sameTOSOH SMD INC·Filed 1999·Granted Jul 16, 2002·48 cites·20 claims
- 2882US4820393ATitanium nitride sputter targetsTOSOH SMD INC·Filed 1987·Granted Apr 11, 1989·53 cites·13 claims
- 2980US2024384395A1Low carbon defect copper-manganese sputtering target and method for producing the sameTOSOH SMD INC·Filed 2024·Application pending·0 cites
- 3080US2024384394A1Low carbon defect copper-manganese sputtering target and method for producing the sameTOSOH SMD INC·Filed 2024·Application pending·0 cites
- 3179US5653856AMethods of bonding targets to backing plate members using gallium based solder pastes and target/backing plate assemblies bonded therebyTOSOH SMD INC·Filed 1996·Granted Aug 5, 1997·55 cites·32 claims
- 3278US10655214B2Method of making a tantalum sputter target and sputter targets made therebyTOSOH SMD INC·Filed 2016·Granted May 19, 2020·1 cites·12 claims
- 3378US8020748B2Sputtering target assembly and method of making sameTOSOH SMD INC·Filed 2007·Granted Sep 20, 2011·5 cites·10 claims
- 3478US7708868B2Variable thickness plate for forming variable wall thickness physical vapor deposition targetTOSOH SMD INC·Filed 2006·Granted May 4, 2010·6 cites·13 claims
- 3577US5963778AMethod for producing near net shape planar sputtering targets and an intermediate thereforTOSOH SMD INC·Filed 1997·Granted Oct 5, 1999·57 cites·25 claims
- 3676US2023287559A1Low carbon defect copper-manganese sputtering target and method for producing the sameTOSOH SMD INC·Filed 2023·Application pending·0 cites
- 3775US9566618B2Silicon sputtering target with special surface treatment and good particle performance and methods of making the sameTOSOH SMD INC·Filed 2012·Granted Feb 14, 2017·2 cites·2 claims
- 3875US9150956B2Monolithic aluminum alloy target and method of manufacturingTOSOH SMD INC·Filed 2013·Granted Oct 6, 2015·1 cites·3 claims
- 3974US6739196B2Cleanliness evaluation in sputter targets using phaseTOSOH SMD INC·Filed 2001·Granted May 25, 2004·15 cites·13 claims
- 4072US7850829B2Sputter targets with expansion grooves for reduced separationTOSOH SMD INC·Filed 2006·Granted Dec 14, 2010·2 cites·14 claims
- 4169US6562207B1Refractory metal silicide alloy sputter targets, use and manufacture thereofTOSOH SMD INC·Filed 1998·Granted May 13, 2003·20 cites·24 claims
- 4269USD382111SSputter target containerTOSOH SMD INC·Filed 1995·Granted Aug 12, 1997·19 cites·1 claims
- 4369US5406850AMethod of non-destructively testing a sputtering targetTOSOH SMD INC·Filed 1993·Granted Apr 18, 1995·40 cites·8 claims
- 4469US5324406AAutomatic brush plating machineTOSOH SMD INC·Filed 1992·Granted Jun 28, 1994·21 cites·11 claims
- 4569US2010038241A1Systems and methods for a target and backing plate assemblyTOSOH SMD INC·Filed 2009·Application pending·0 cites
- 4668US5342571AMethod for producing sputtering target for deposition of titanium, aluminum and nitrogen coatings, sputtering target made thereby, and method of sputtering with said targetsTOSOH SMD INC·Filed 1992·Granted Aug 30, 1994·35 cites·20 claims
- 4768US5147521AQuick change sputter target assemblyTOSOH SMD INC·Filed 1991·Granted Sep 15, 1992·28 cites·5 claims
- 4868US4820397AQuick change sputter target assemblyTOSOH SMD INC·Filed 1988·Granted Apr 11, 1989·33 cites·12 claims
- 4966US12545993B2Tantalum sputtering target with improved performance and predictability and method of manufacturingTOSOH SMD INC·Filed 2025·Granted Feb 10, 2026·0 cites·11 claims
- 5066US8037727B2Non-planar sputter targets having crystallographic orientations promoting uniform depositionTOSOH SMD INC·Filed 2009·Granted Oct 18, 2011·2 cites·15 claims
Showing the top 50 of 106 patent records by PatentIndex Score.
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