Assignee
TRE SEMICONDUCTOR EQUIPMENT CO
US·7 granted patents·372 citations·filing 1981–1982
Top patents by PatentIndex Score
7 records- 0191US4475122AAutomatic wafer alignment techniqueTRE SEMICONDUCTOR EQUIPMENT CO·Filed 1981·Granted Oct 2, 1984·159 cites·11 claims
- 0289US4541712ALaser pattern generating systemTRE SEMICONDUCTOR EQUIPMENT CO·Filed 1981·Granted Sep 17, 1985·75 cites·43 claims
- 0383US4419013APhase contrast alignment system for a semiconductor manufacturing apparatusTRE SEMICONDUCTOR EQUIPMENT CO·Filed 1981·Granted Dec 6, 1983·38 cites·8 claims
- 0478US4441808AFocusing device for photo-exposure systemTRE SEMICONDUCTOR EQUIPMENT CO·Filed 1982·Granted Apr 10, 1984·52 cites·4 claims
- 0551US4521114ASingle lens repeaterTRE SEMICONDUCTOR EQUIPMENT CO·Filed 1981·Granted Jun 4, 1985·15 cites·10 claims
- 0650US4474463AMixer coupling lens subassembly for photolithographic systemTRE SEMICONDUCTOR EQUIPMENT CO·Filed 1982·Granted Oct 2, 1984·10 cites·1 claims
- 0744US4550374AHigh speed alignment method for wafer stepperTRE SEMICONDUCTOR EQUIPMENT CO·Filed 1982·Granted Oct 29, 1985·23 cites·8 claims
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Counts cover granted patents and pending applications in the PatentIndex corpus. How scoring works →