Assignee
TREICHEL HELMUTH
0 granted patents·6 pending applications·0 citations·filing 2006–2011
Top patents by PatentIndex Score
6 records- 0154US2008038486A1Radical Assisted Batch Film DepositionTREICHEL HELMUTH·Filed 2007·Application pending·0 cites
- 0250US2007160756A1Apparatus and method for the deposition of ruthenium containing filmsTREICHEL HELMUTH·Filed 2006·Application pending·0 cites
- 0341US2012129344A1Process and apparatus for removal of contaminating material from substratesTREICHEL HELMUTH·Filed 2010·Application pending·0 cites
- 0439US2012186572A1Silicon wafer sawing fluid and process for use thereofTREICHEL HELMUTH·Filed 2010·Application pending·0 cites
- 0536US2012111361A1Method for substrate surface cleaningTREICHEL HELMUTH·Filed 2011·Application pending·0 cites
- 0636US2012111360A1Method and Apparatus for Cleaning a SubstrateTREICHEL HELMUTH·Filed 2010·Application pending·0 cites
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