Assignee
TRIKON EQUIP LTD
US·11 granted patents·259 citations·filing 1997–2001
Top patents by PatentIndex Score
11 records- 0186US6089472AShower headTRIKON EQUIP LTD·Filed 1998·Granted Jul 18, 2000·60 cites·9 claims
- 0282US6544858B1Method for treating silicon-containing polymer layers with plasma or electromagnetic radiationTRIKON EQUIP LTD·Filed 1999·Granted Apr 8, 2003·92 cites·37 claims
- 0375US6242366B1Methods and apparatus for treating a semiconductor substrateTRIKON EQUIP LTD·Filed 1999·Granted Jun 5, 2001·50 cites·20 claims
- 0454US6174823B1Methods of forming a barrier layerTRIKON EQUIP LTD·Filed 1997·Granted Jan 16, 2001·16 cites·19 claims
- 0553US6188563B1Platen for semiconductor workpiecesTRIKON EQUIP LTD·Filed 1998·Granted Feb 13, 2001·18 cites·14 claims
- 0646US6169027B1Method of removing surface oxides found on a titanium oxynitride layer using a nitrogen containing plasmaTRIKON EQUIP LTD·Filed 1997·Granted Jan 2, 2001·10 cites·23 claims
- 0732US6256186B1Electrostatic chucksTRIKON EQUIP LTD·Filed 1998·Granted Jul 3, 2001·7 cites·9 claims
- 0831US6423635B1Method of filling a recessTRIKON EQUIP LTD·Filed 1998·Granted Jul 23, 2002·2 cites·18 claims
- 0928US6454367B1Apparatus for processing workpiecesTRIKON EQUIP LTD·Filed 1998·Granted Sep 24, 2002·2 cites·12 claims
- 1027US6517087B2High pressure sealTRIKON EQUIP LTD·Filed 2001·Granted Feb 11, 2003·0 cites·19 claims
- 1127US6279917B1High pressure sealTRIKON EQUIP LTD·Filed 1997·Granted Aug 28, 2001·2 cites·10 claims
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