Assignee
TRUSI TECHNOLOGIES LLC
US·8 granted patents·842 citations·filing 1997–1999
Top patents by PatentIndex Score
8 records- 0199US6184060B1Integrated circuits and methods for their fabricationTRUSI TECHNOLOGIES LLC·Filed 1998·Granted Feb 6, 2001·542 cites·23 claims
- 0283US6095582AArticle holders and holding methodsTRUSI TECHNOLOGIES LLC·Filed 1998·Granted Aug 1, 2000·79 cites·4 claims
- 0381US6402843B1Non-contact workpiece holderTRUSI TECHNOLOGIES LLC·Filed 1999·Granted Jun 11, 2002·62 cites·13 claims
- 0476US6139678APlasma processing methods and apparatusTRUSI TECHNOLOGIES LLC·Filed 1997·Granted Oct 31, 2000·35 cites·8 claims
- 0572US5767627APlasma generation and plasma processing of materialsTRUSI TECHNOLOGIES LLC·Filed 1997·Granted Jun 16, 1998·54 cites·20 claims
- 0670US6168697B1Holders suitable to hold articles during processing and article processing methodsTRUSI TECHNOLOGIES LLC·Filed 1998·Granted Jan 2, 2001·36 cites·19 claims
- 0764US6203661B1Brim and gas escape for non-contact wafer holderTRUSI TECHNOLOGIES LLC·Filed 1999·Granted Mar 20, 2001·24 cites·16 claims
- 0839US6121571APlasma generator ignition circuitTRUSI TECHNOLOGIES LLC·Filed 1999·Granted Sep 19, 2000·10 cites·12 claims
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