Assignee
TSAI KUEN-YU
TW·6 granted patents·4 pending applications·29 citations·filing 2010–2012
Top patents by PatentIndex Score
10 records- 0185US9087173B2Determining proximity effect parameters for non-rectangular semiconductor structuresTSAI KUEN-YU·Filed 2010·Granted Jul 21, 2015·12 cites·20 claims
- 0277US8438505B2Method for improving accuracy of parasitics extraction considering sub-wavelength lithography effectsTSAI KUEN-YU·Filed 2012·Granted May 7, 2013·8 cites·19 claims
- 0372US8578303B1Method for compensating effect of patterning process and apparatus thereofTSAI KUEN-YU·Filed 2012·Granted Nov 5, 2013·4 cites·20 claims
- 0470US9541500B2Method for calibrating a manufacturing process modelTSAI KUEN-YU·Filed 2012·Granted Jan 10, 2017·2 cites·14 claims
- 0564US8539392B2Method for compensating proximity effects of particle beam lithography processesTSAI KUEN-YU·Filed 2012·Granted Sep 17, 2013·2 cites·13 claims
- 0656US8490033B2Method and apparatus for designing patterning system based on patterning fidelityTSAI KUEN-YU·Filed 2012·Granted Jul 16, 2013·1 cites·8 claims
- 0749US2012112086A1System and method for estimating change of status of particle beamsTSAI KUEN-YU·Filed 2011·Application pending·0 cites
- 0849US2012112065A1Apparatus and method for estimating change of status of particle beamsTSAI KUEN-YU·Filed 2011·Application pending·0 cites
- 0949US2012112091A1Method for adjusting status of particle beams for patterning a substrate and system using the sameTSAI KUEN-YU·Filed 2011·Application pending·0 cites
- 1035US2013297061A1Method and computer-aided design system of manufacturing an optical systemTSAI KUEN-YU·Filed 2012·Application pending·0 cites
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