Assignee
TSK AMERICA INC
US·4 granted patents·138 citations·filing 1998–2000
Top patents by PatentIndex Score
4 records- 0186US6306016B1Wafer notch polishing machine and method of polishing an orientation notch in a waferTSK AMERICA INC·Filed 2000·Granted Oct 23, 2001·32 cites·23 claims
- 0269US6055694AWafer scrubbing machineTSK AMERICA INC·Filed 1998·Granted May 2, 2000·46 cites·23 claims
- 0367US6271676B1Spiral chuckTSK AMERICA INC·Filed 1999·Granted Aug 7, 2001·35 cites·23 claims
- 0460US6290274B1Vacuum system and method for securing a semiconductor wafer in a planar positionTSK AMERICA INC·Filed 1999·Granted Sep 18, 2001·25 cites·20 claims
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