Assignee
TSUKIHARA KOICHI
JP·2 granted patents·1 pending application·2 citations·filing 2008–2011
Top patents by PatentIndex Score
3 records- 0157US8451536B2Irradiation apparatus and manufacturing method for semiconductor deviceTSUKIHARA KOICHI·Filed 2010·Granted May 28, 2013·1 cites·1 claims
- 0256US8592713B2Irradiating apparatus, semiconductor device manufacturing apparatus, semiconductor device manufacturing method, and display device manufacturing methodTSUKIHARA KOICHI·Filed 2008·Granted Nov 26, 2013·1 cites·9 claims
- 0346US2012038983A1Irradiation optical system, irradiation apparatus and fabrication method for semiconductor deviceTSUKIHARA KOICHI·Filed 2011·Application pending·0 cites
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