Assignee
TUNG MING-HAU
US·4 granted patents·2 pending applications·6 citations·filing 2006–2012
Top patents by PatentIndex Score
6 records- 0179US8964280B2Method of manufacturing MEMS devices providing air gap controlTUNG MING-HAU·Filed 2012·Granted Feb 24, 2015·2 cites·38 claims
- 0271US8300299B2MEMS devices with multi-component sacrificial layersTUNG MING-HAU·Filed 2011·Granted Oct 30, 2012·2 cites·23 claims
- 0363US8102590B2Method of manufacturing MEMS devices providing air gap controlTUNG MING-HAU·Filed 2009·Granted Jan 24, 2012·2 cites·11 claims
- 0454US9110281B2Vertically etched facets for display devicesTUNG MING-HAU·Filed 2012·Granted Aug 18, 2015·0 cites·23 claims
- 0537US2007249078A1Non-planar surface structures and process for microelectromechanical systemsTUNG MING-HAU·Filed 2006·Application pending·0 cites
- 0635US2013135184A1Encapsulated arrays of electromechanical systems devicesTUNG MING-HAU·Filed 2011·Application pending·0 cites
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Counts cover granted patents and pending applications in the PatentIndex corpus. How scoring works →