Assignee
UHA MIKAKUTO PRECISION ENGINEE
JP·2 granted patents·124 citations·filing 1990–1991
Top patents by PatentIndex Score
2 records- 0191US5310426AHigh-speed film forming method by microwave plasma chemical vapor deposition (CVD) under high pressure and an apparatus thereforUHA MIKAKUTO PRECISION ENGINEE·Filed 1991·Granted May 10, 1994·74 cites·7 claims
- 0287US5037666AHigh-speed film forming method by microwave plasma chemical vapor deposition (CVD) under high pressureUHA MIKAKUTO PRECISION ENGINEE·Filed 1990·Granted Aug 6, 1991·50 cites·5 claims
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