Assignee
UI AKIO
JP·4 granted patents·2 pending applications·58 citations·filing 2008–2012
Top patents by PatentIndex Score
6 records- 0195US8821684B2Substrate plasma processing apparatus and plasma processing methodUI AKIO·Filed 2009·Granted Sep 2, 2014·52 cites·5 claims
- 0277US8821744B2Substrate processing method and substrate processing apparatusUI AKIO·Filed 2011·Granted Sep 2, 2014·4 cites·9 claims
- 0361US9583360B2Substrate processing apparatus and substrate processing methodUI AKIO·Filed 2012·Granted Feb 28, 2017·1 cites·8 claims
- 0461US8252193B2Plasma processing apparatus of substrate and plasma processing method thereofUI AKIO·Filed 2008·Granted Aug 28, 2012·1 cites·9 claims
- 0554US2010072172A1Substrate processing apparatus and substrate processing methodUI AKIO·Filed 2009·Application pending·0 cites
- 0649US2013061870A1Method of cleaning film forming apparatusUI AKIO·Filed 2012·Application pending·0 cites
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