Assignee
ULTRATECH STEPPER INC
US·59 granted patents·1 pending application·4,463 citations·filing 1992–2003
Top patents by PatentIndex Score
60 records- 0199US6072251AMagnetically positioned X-Y stage having six degrees of freedomULTRATECH STEPPER INC·Filed 1999·Granted Jun 6, 2000·270 cites·35 claims
- 0298US6747245B2Laser scanning apparatus and methods for thermal processingULTRATECH STEPPER INC·Filed 2002·Granted Jun 8, 2004·190 cites·43 claims
- 0398US6635588B1Method for laser thermal processing using thermally induced reflectivity switchULTRATECH STEPPER INC·Filed 2002·Granted Oct 21, 2003·287 cites·30 claims
- 0498US6531681B1Apparatus having line source of radiant energy for exposing a substrateULTRATECH STEPPER INC·Filed 2000·Granted Mar 11, 2003·241 cites·27 claims
- 0598US6479821B1Thermally induced phase switch for laser thermal processingULTRATECH STEPPER INC·Filed 2000·Granted Nov 12, 2002·289 cites·48 claims
- 0696US6441514B1Magnetically positioned X-Y stage having six degrees of freedomULTRATECH STEPPER INC·Filed 2000·Granted Aug 27, 2002·99 cites·11 claims
- 0796US6324330B1Folded light tunnel apparatus and methodULTRATECH STEPPER INC·Filed 2000·Granted Nov 27, 2001·139 cites·38 claims
- 0895US6365476B1Laser thermal process for fabricating field-effect transistorsULTRATECH STEPPER INC·Filed 2000·Granted Apr 2, 2002·125 cites·21 claims
- 0995US5363196AApparatus for measuring a departure from flatness or straightness of a nominally-plane mirror for a precision X-Y movable-stageULTRATECH STEPPER INC·Filed 1992·Granted Nov 8, 1994·112 cites·11 claims
- 1094US6380044B1High-speed semiconductor transistor and selective absorption process forming sameULTRATECH STEPPER INC·Filed 2000·Granted Apr 30, 2002·95 cites·80 claims
- 1194US6366308B1Laser thermal processing apparatus and methodULTRATECH STEPPER INC·Filed 2000·Granted Apr 2, 2002·119 cites·31 claims
- 1293US6383956B2Method of forming thermally induced reflectivity switch for laser thermal processingULTRATECH STEPPER INC·Filed 2001·Granted May 7, 2002·61 cites·17 claims
- 1393US6303476B1Thermally induced reflectivity switch for laser thermal processingULTRATECH STEPPER INC·Filed 2000·Granted Oct 16, 2001·62 cites·12 claims
- 1493US6142641AFour-mirror extreme ultraviolet (EUV) lithography projection systemULTRATECH STEPPER INC·Filed 1998·Granted Nov 7, 2000·131 cites·31 claims
- 1593US5997963AMicrochamberULTRATECH STEPPER INC·Filed 1998·Granted Dec 7, 1999·215 cites·48 claims
- 1692US6680774B1Method and apparatus for mechanically masking a workpieceULTRATECH STEPPER INC·Filed 2001·Granted Jan 20, 2004·90 cites·16 claims
- 1792US6671235B1Method of and apparatus for defining disk tracks in magnetic recording mediaULTRATECH STEPPER INC·Filed 2000·Granted Dec 30, 2003·37 cites·31 claims
- 1892US6300208B1Methods for annealing an integrated device using a radiant energy absorber layerULTRATECH STEPPER INC·Filed 2000·Granted Oct 9, 2001·61 cites·55 claims
- 1992US6274488B1Method of forming a silicide region in a Si substrate and a device having sameULTRATECH STEPPER INC·Filed 2000·Granted Aug 14, 2001·79 cites·27 claims
- 2092US5908307AFabrication method for reduced-dimension FET devicesULTRATECH STEPPER INC·Filed 1997·Granted Jun 1, 1999·138 cites·38 claims
- 2192US5886432AMagnetically-positioned X-Y stage having six-degrees of freedomULTRATECH STEPPER INC·Filed 1997·Granted Mar 23, 1999·80 cites·19 claims
- 2291US6777833B1Magnetic levitation stage apparatus and methodULTRATECH STEPPER INC·Filed 2001·Granted Aug 17, 2004·43 cites·70 claims
- 2391US6753947B2Lithography system and method for device manufactureULTRATECH STEPPER INC·Filed 2001·Granted Jun 22, 2004·53 cites·100 claims
- 2491US6645838B1Selective absorption process for forming an activated doped region in a semiconductorULTRATECH STEPPER INC·Filed 2002·Granted Nov 11, 2003·60 cites·12 claims
- 2591US6381077B1Scanning microlithographic apparatus and method for projecting a large field-of-view image on a substrateULTRATECH STEPPER INC·Filed 2000·Granted Apr 30, 2002·44 cites·24 claims
- 2691US5888888AMethod for forming a silicide region on a silicon bodyULTRATECH STEPPER INC·Filed 1997·Granted Mar 30, 1999·122 cites·32 claims
- 2790US6525805B2Backside alignment system and methodULTRATECH STEPPER INC·Filed 2001·Granted Feb 25, 2003·66 cites·17 claims
- 2890US6507405B1Fiber-optic interferometer employing low-coherence-length light for precisely measuring absolute distance and tiltULTRATECH STEPPER INC·Filed 1999·Granted Jan 14, 2003·95 cites·21 claims
- 2989US6495390B2Thermally induced reflectivity switch for laser thermal processingULTRATECH STEPPER INC·Filed 2001·Granted Dec 17, 2002·38 cites·40 claims
- 3089US5410434AReflective projection system comprising four spherical mirrorsULTRATECH STEPPER INC·Filed 1993·Granted Apr 25, 1995·93 cites·14 claims
- 3188US6570656B1Illumination fluence regulation system and method for use in thermal processing employed in the fabrication of reduced-dimension integrated circuitsULTRATECH STEPPER INC·Filed 2000·Granted May 27, 2003·48 cites·17 claims
- 3288US6556279B1Motion compensation system and method for lithographyULTRATECH STEPPER INC·Filed 2001·Granted Apr 29, 2003·34 cites·25 claims
- 3387US5822066APoint diffraction interferometer and pin mirror for use therewithULTRATECH STEPPER INC·Filed 1997·Granted Oct 13, 1998·68 cites·74 claims
- 3486US5956603AGas immersion laser annealing method suitable for use in the fabrication of reduced-dimension integrated circuitsULTRATECH STEPPER INC·Filed 1998·Granted Sep 21, 1999·83 cites·15 claims
- 3585US6420264B1Method of forming a silicide region in a Si substrate and a device having sameULTRATECH STEPPER INC·Filed 2001·Granted Jul 16, 2002·41 cites·25 claims
- 3685US6347176B1Acousto-optical light tunnel apparatus and methodULTRATECH STEPPER INC·Filed 2000·Granted Feb 12, 2002·32 cites·25 claims
- 3784US6554464B1Apparatus for and method of reducing or eliminating interference effects in a light tunnel illuminatorULTRATECH STEPPER INC·Filed 2000·Granted Apr 29, 2003·31 cites·17 claims
- 3882US6777317B2Method for semiconductor gate dopingULTRATECH STEPPER INC·Filed 2001·Granted Aug 17, 2004·41 cites·23 claims
- 3982US6635541B1Method for annealing using partial absorber layer exposed to radiant energy and article made with partial absorber layerULTRATECH STEPPER INC·Filed 2000·Granted Oct 21, 2003·29 cites·22 claims
- 4082US5852693ALow-loss light redirection apparatusULTRATECH STEPPER INC·Filed 1996·Granted Dec 22, 1998·63 cites·55 claims
- 4180US6731376B1System and method for reducing colinearity effects in manufacturing microdevicesULTRATECH STEPPER INC·Filed 2001·Granted May 4, 2004·17 cites·27 claims
- 4277US6388297B1Structure and method for an optical block in shallow trench isolation for improved laser anneal controlULTRATECH STEPPER INC·Filed 2000·Granted May 14, 2002·20 cites·6 claims
- 4376US5621813APattern recognition alignment systemULTRATECH STEPPER INC·Filed 1995·Granted Apr 15, 1997·68 cites·16 claims
- 4475US6029361AAir-guage nozzle probe structure for microlithographic image focusingULTRATECH STEPPER INC·Filed 1998·Granted Feb 29, 2000·40 cites·18 claims
- 4574US6297135B1Method for forming silicide regions on an integrated deviceULTRATECH STEPPER INC·Filed 1998·Granted Oct 2, 2001·42 cites·50 claims
- 4672US5557469ABeamsplitter in single fold optical system and optical variable magnification method and systemULTRATECH STEPPER INC·Filed 1994·Granted Sep 17, 1996·36 cites·28 claims
- 4770US6387803B2Method for forming a silicide region on a silicon bodyULTRATECH STEPPER INC·Filed 1998·Granted May 14, 2002·37 cites·42 claims
- 4869US6089525ASix axis active vibration isolation and payload reaction force compensation systemULTRATECH STEPPER INC·Filed 1997·Granted Jul 18, 2000·28 cites·17 claims
- 4968US5303001AIllumination system for half-field dyson stepperULTRATECH STEPPER INC·Filed 1992·Granted Apr 12, 1994·31 cites·25 claims
- 5066US6326219B2Methods for determining wavelength and pulse length of radiant energy used for annealingULTRATECH STEPPER INC·Filed 1999·Granted Dec 4, 2001·29 cites·85 claims
Showing the top 50 of 60 patent records by PatentIndex Score.
Counts cover granted patents and pending applications in the PatentIndex corpus. How scoring works →