Assignee
ULVAC COATING CORP
JP·13 granted patents·2 pending applications·473 citations·filing 1993–2020
Top patents by PatentIndex Score
15 records- 0196US5474864APhase shift mask and manufacturing method thereof and exposure method using phase shift maskULVAC COATING CORP·Filed 1993·Granted Dec 12, 1995·99 cites·8 claims
- 0284US6569577B1Phase-shift photo mask blank, phase-shift photo mask and method for fabricating semiconductor devicesULVAC COATING CORP·Filed 2000·Granted May 27, 2003·40 cites·17 claims
- 0384US5605776APhase-shifting photomask blank, phase-shifting photomask, and method of manufacturing themULVAC COATING CORP·Filed 1995·Granted Feb 25, 1997·58 cites·28 claims
- 0483US5952128APhase-shifting photomask blank and method of manufacturing the same as well as phase-shifting photomaskULVAC COATING CORP·Filed 1996·Granted Sep 14, 1999·48 cites·5 claims
- 0582US5830607APhase shift mask and manufacturing method thereof and exposure method using phase shift maskULVAC COATING CORP·Filed 1997·Granted Nov 3, 1998·46 cites·3 claims
- 0682US5691090APhase shift mask and manufacturing method thereof and exposure method using phase shift maskULVAC COATING CORP·Filed 1996·Granted Nov 25, 1997·38 cites·27 claims
- 0781US5629114APhase shift mask and manufacturing method thereof and exposure method using phase shift mask comprising a semitransparent regionULVAC COATING CORP·Filed 1995·Granted May 13, 1997·37 cites·19 claims
- 0877US6689515B2Phase-shifting photomask blank, phase-shifting photomask, method for producing them and apparatus for manufacturing the blankULVAC COATING CORP·Filed 2001·Granted Feb 10, 2004·13 cites·2 claims
- 0976US5674647APhase shift mask and manufacturing method thereof and exposure method using phase shift maskULVAC COATING CORP·Filed 1995·Granted Oct 7, 1997·33 cites·59 claims
- 1071US6391791B1Dry-etching method and apparatus, photomasks and method for the preparation thereof, and semiconductor circuits and methods for the fabrication thereofULVAC COATING CORP·Filed 1999·Granted May 21, 2002·33 cites·6 claims
- 1161US6228541B1Phase-shifting photomask blank, phase-shifting photomask, method for producing them and apparatus for manufacturing the blankULVAC COATING CORP·Filed 1999·Granted May 8, 2001·19 cites·20 claims
- 1251US6844117B2Dry-etching method and apparatus, photomasks and method for the preparation thereof, and semiconductor circuits and method for the fabrication thereofULVAC COATING CORP·Filed 2002·Granted Jan 18, 2005·3 cites·2 claims
- 1349US2022048811A1Quartz etching method and etched substrateULVAC COATING CORP·Filed 2020·Application pending·0 cites
- 1441US2010294651A1Process for producing gray tone maskULVAC COATING CORP·Filed 2008·Application pending·0 cites
- 1538US6685848B1Method and apparatus for dry-etching half-tone phase-shift films half-tone phase-shift photomasks and method for the preparation thereof and semiconductor circuits and method for the fabrication thereofULVAC COATING CORP·Filed 1999·Granted Feb 3, 2004·6 cites·11 claims
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