Assignee
ULVAC CORP
JP·66 granted patents·1,990 citations·filing 1972–2001
Top patents by PatentIndex Score
66 records- 0196US4401546AFerromagnetic high speed sputtering apparatusULVAC CORP·Filed 1982·Granted Aug 30, 1983·82 cites·3 claims
- 0294US6275649B1Evaporation apparatusULVAC CORP·Filed 2000·Granted Aug 14, 2001·73 cites·10 claims
- 0392US4283482ADry Lithographic ProcessULVAC CORP·Filed 1980·Granted Aug 11, 1981·77 cites·6 claims
- 0487US4624867AProcess for forming a synthetic resin film on a substrate and apparatus thereforULVAC CORP·Filed 1985·Granted Nov 25, 1986·75 cites·18 claims
- 0587US4581245AMethod of manufacturing of abrasion resisting magnetic recording productULVAC CORP·Filed 1982·Granted Apr 8, 1986·24 cites·2 claims
- 0687US4412907AFerromagnetic high speed sputtering apparatusULVAC CORP·Filed 1982·Granted Nov 1, 1983·29 cites·7 claims
- 0786US4804590AAbrasion resistant magnetic recording memberULVAC CORP·Filed 1986·Granted Feb 14, 1989·34 cites·8 claims
- 0885US6217730B1Sputtering deviceULVAC CORP·Filed 2000·Granted Apr 17, 2001·27 cites·11 claims
- 0984US6781812B2Chuck equipmentULVAC CORP·Filed 2001·Granted Aug 24, 2004·44 cites·11 claims
- 1083US5288329AChemical vapor deposition apparatus of in-line typeULVAC CORP·Filed 1990·Granted Feb 22, 1994·52 cites·8 claims
- 1183US4800105AMethod of forming a thin film by chemical vapor depositionULVAC CORP·Filed 1987·Granted Jan 24, 1989·47 cites·8 claims
- 1282US5228052APlasma ashing apparatusULVAC CORP·Filed 1991·Granted Jul 13, 1993·46 cites·7 claims
- 1381US6533630B1Vacuum device and method of manufacturing plasma display deviceULVAC CORP·Filed 2000·Granted Mar 18, 2003·24 cites·12 claims
- 1481US6473564B1Method of manufacturing thin organic filmULVAC CORP·Filed 2000·Granted Oct 29, 2002·23 cites·10 claims
- 1581US6101316AEvaporation apparatus, organic material evaporation source, and method of manufacturing thin organic filmULVAC CORP·Filed 1998·Granted Aug 8, 2000·62 cites·11 claims
- 1681US4924807AApparatus for chemical vapor depositionULVAC CORP·Filed 1987·Granted May 15, 1990·62 cites·28 claims
- 1781US4661420AOptical magnetic recording memberULVAC CORP·Filed 1985·Granted Apr 28, 1987·31 cites·3 claims
- 1880US5250339AMagnetic recording mediumULVAC CORP·Filed 1992·Granted Oct 5, 1993·30 cites·1 claims
- 1979US5180476AMethod for producing transparent conductive filmsULVAC CORP·Filed 1991·Granted Jan 19, 1993·53 cites·3 claims
- 2078US6812634B2Graphite nanofibers, electron-emitting source and method for preparing the same, display element equipped with the electron-emitting source as well as lithium ion secondary batteryULVAC CORP·Filed 2001·Granted Nov 2, 2004·14 cites·11 claims
- 2178US5554418AMethod of forming passivation filmULVAC CORP·Filed 1994·Granted Sep 10, 1996·41 cites·6 claims
- 2278US5244501AApparatus for chemical vapor depositionULVAC CORP·Filed 1991·Granted Sep 14, 1993·65 cites·29 claims
- 2377US5851589AMethod for thermal chemical vapor depositionULVAC CORP·Filed 1994·Granted Dec 22, 1998·41 cites·4 claims
- 2477US5226056APlasma ashing method and apparatus thereforULVAC CORP·Filed 1990·Granted Jul 6, 1993·94 cites·8 claims
- 2577US4902531AVacuum processing method and apparatusULVAC CORP·Filed 1987·Granted Feb 20, 1990·45 cites·6 claims
- 2677US4841197ADouble-chamber ion sourceULVAC CORP·Filed 1987·Granted Jun 20, 1989·29 cites·10 claims
- 2777US4837603AMethod of correcting azimuth angle of photometric ellipsometersULVAC CORP·Filed 1986·Granted Jun 6, 1989·39 cites·4 claims
- 2877US4624767ASputter etching apparatus having a second electrically floating electrode and magnet meansULVAC CORP·Filed 1985·Granted Nov 25, 1986·39 cites·3 claims
- 2976US6413392B1Sputtering deviceULVAC CORP·Filed 2000·Granted Jul 2, 2002·19 cites·14 claims
- 3075US4894546AHollow cathode ion sourcesULVAC CORP·Filed 1988·Granted Jan 16, 1990·24 cites·12 claims
- 3174US6469448B2Inductively coupled RF plasma sourceULVAC CORP·Filed 2001·Granted Oct 22, 2002·17 cites·11 claims
- 3274US4832810ACo-based alloy sputter target and process of manufacturing the sameULVAC CORP·Filed 1987·Granted May 23, 1989·31 cites·6 claims
- 3373US6290826B1Composite sputtering cathode assembly and sputtering apparatus with such composite sputtering cathode assemblyULVAC CORP·Filed 1997·Granted Sep 18, 2001·30 cites·20 claims
- 3473US5770025AMagnetron sputtering apparatusULVAC CORP·Filed 1996·Granted Jun 23, 1998·48 cites·3 claims
- 3573US4611121AMagnet apparatusULVAC CORP·Filed 1984·Granted Sep 9, 1986·19 cites·8 claims
- 3673US4237183AProcess for the surface treatment of a synthetic resin lens and the product thereofULVAC CORP·Filed 1978·Granted Dec 2, 1980·22 cites·6 claims
- 3772US6507698B2Evaporation apparatus, organic material evaporation source, and method of manufacturing thin organic filmULVAC CORP·Filed 2001·Granted Jan 14, 2003·10 cites·3 claims
- 3872US5751002AIon implantation apparatusULVAC CORP·Filed 1996·Granted May 12, 1998·35 cites·15 claims
- 3972US4942342AParallel sweeping system for electrostatic sweeping ion implanterULVAC CORP·Filed 1988·Granted Jul 17, 1990·18 cites·4 claims
- 4069US5561240ALeak detecting apparatus using compound turbo-molecular pumpULVAC CORP·Filed 1995·Granted Oct 1, 1996·46 cites·4 claims
- 4166US4983850AIon implantation deviceULVAC CORP·Filed 1989·Granted Jan 8, 1991·17 cites·8 claims
- 4266US4816046AFine particle collector trap for vacuum evacuating systemULVAC CORP·Filed 1988·Granted Mar 28, 1989·28 cites·5 claims
- 4365US4848814AWafer transfer handULVAC CORP·Filed 1987·Granted Jul 18, 1989·31 cites·4 claims
- 4464US5116479AProcess for producing transparent conductive film comprising indium oxideULVAC CORP·Filed 1990·Granted May 26, 1992·16 cites·2 claims
- 4563US5125360AVacuum processing apparatusULVAC CORP·Filed 1989·Granted Jun 30, 1992·27 cites·15 claims
- 4663US5011793AVacuum deposition using pressurized reflow processULVAC CORP·Filed 1990·Granted Apr 30, 1991·35 cites·9 claims
- 4762US6254747B1Magnetron sputtering source enclosed by a mirror-finished metallic coverULVAC CORP·Filed 1997·Granted Jul 3, 2001·27 cites·2 claims
- 4860US5734163AZero method of controlling quadrupole mass spectrometer and control circuit arrangement to carry out this methodULVAC CORP·Filed 1996·Granted Mar 31, 1998·17 cites·4 claims
- 4960US4832715AFine particle collector arrangement for vacuum pumpsULVAC CORP·Filed 1988·Granted May 23, 1989·20 cites·7 claims
- 5056US5762750AMagnetic neutral line discharged plasma type surface cleaning apparatusULVAC CORP·Filed 1997·Granted Jun 9, 1998·12 cites·4 claims
Showing the top 50 of 66 patent records by PatentIndex Score.
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