Assignee
ULVAC INC
JP·214 granted patents·256 pending applications·1,366 citations·filing 1997–2025
Top patents by PatentIndex Score
470 records- 0197US7821767B2Electrostatic chuck deviceULVAC INC·Filed 2005·Granted Oct 26, 2010·67 cites·2 claims
- 0297US7815965B2Industrial microdeposition system including masking to reduce the impact of droplet alignment and droplet volume tolerances and errorsULVAC INC·Filed 2009·Granted Oct 19, 2010·27 cites·17 claims
- 0397US7757632B2Waveform generator for microdeposition control systemULVAC INC·Filed 2008·Granted Jul 20, 2010·40 cites·21 claims
- 0494US7510984B2Method of forming silicon nitride film and method of manufacturing semiconductor deviceULVAC INC·Filed 2005·Granted Mar 31, 2009·86 cites·8 claims
- 0593US11112176B2Freeze vacuum drying apparatus and freeze vacuum drying methodULVAC INC·Filed 2020·Granted Sep 7, 2021·6 cites·9 claims
- 0693US8764902B2Film-forming apparatusULVAC INC·Filed 2013·Granted Jul 1, 2014·30 cites·7 claims
- 0793US7901026B2Drop analysis systemULVAC INC·Filed 2006·Granted Mar 8, 2011·21 cites·12 claims
- 0893US7763115B2Vacuum film-forming apparatusULVAC INC·Filed 2005·Granted Jul 27, 2010·34 cites·9 claims
- 0992US7927472B2Optical film thickness controlling method, optical film thickness controlling apparatus, dielectric multilayer film manufacturing apparatus, and dielectric multilayer film manufactured using the same controlling apparatus or manufacturing apparatusULVAC INC·Filed 2007·Granted Apr 19, 2011·26 cites·9 claims
- 1092US7887156B2Integral printhead assemblyULVAC INC·Filed 2006·Granted Feb 15, 2011·26 cites·24 claims
- 1192US7449070B2Waveform generator for microdeposition control systemULVAC INC·Filed 2002·Granted Nov 11, 2008·40 cites·20 claims
- 1292US7419904B2Method for forming barrier film and method for forming electrode filmULVAC INC·Filed 2006·Granted Sep 2, 2008·30 cites·12 claims
- 1391US11320200B1Freeze-drying device and freeze-drying methodULVAC INC·Filed 2021·Granted May 3, 2022·6 cites·8 claims
- 1491US9960018B2RF sputtering apparatus and sputtering methodULVAC INC·Filed 2016·Granted May 1, 2018·3 cites·8 claims
- 1590US11732965B2Freeze-drying device and freeze-drying methodULVAC INC·Filed 2022·Granted Aug 22, 2023·3 cites·8 claims
- 1690US7081214B2Electroconductive metal paste and method for production thereofULVAC INC·Filed 2001·Granted Jul 25, 2006·76 cites·21 claims
- 1789US7828900B2Vacuum film-forming apparatusULVAC INC·Filed 2008·Granted Nov 9, 2010·17 cites·11 claims
- 1888US7728252B2Etching method and systemULVAC INC·Filed 2005·Granted Jun 1, 2010·12 cites·9 claims
- 1988US7338900B2Method for forming tungsten nitride filmULVAC INC·Filed 2005·Granted Mar 4, 2008·20 cites·12 claims
- 2086US9903012B2Film formation method and film formation apparatusULVAC INC·Filed 2012·Granted Feb 27, 2018·3 cites·9 claims
- 2186US8028972B2Gate valve for vacuum apparatusULVAC INC·Filed 2006·Granted Oct 4, 2011·14 cites·1 claims
- 2286US7645112B2Transport apparatus, control method for the same, and vacuum processing systemULVAC INC·Filed 2005·Granted Jan 12, 2010·12 cites·14 claims
- 2386US7611754B2Industrial microdeposition system including masking to reduce the impact of droplet alignment and droplet volume tolerances and errorsULVAC INC·Filed 2002·Granted Nov 3, 2009·25 cites·16 claims
- 2485US8356575B2Ion source and plasma processing apparatusULVAC INC·Filed 2006·Granted Jan 22, 2013·33 cites·5 claims
- 2585US6930316B2Ion implantation system and ion implantation methodULVAC INC·Filed 2001·Granted Aug 16, 2005·60 cites·15 claims
- 2685US6706155B2Sputtering apparatus and film manufacturing methodULVAC INC·Filed 2001·Granted Mar 16, 2004·28 cites·13 claims
- 2784US11319627B2Vacuum processing apparatusULVAC INC·Filed 2019·Granted May 3, 2022·3 cites·9 claims
- 2884US11239063B2Vacuum processing apparatusULVAC INC·Filed 2019·Granted Feb 1, 2022·3 cites·4 claims
- 2984US7628840B2Metal nano-particles and method for preparing the same, dispersion of metal nano-particles and method for preparing the same, and thin metallic wire and metal film and method for preparing these substancesULVAC INC·Filed 2004·Granted Dec 8, 2009·38 cites·16 claims
- 3083US8367542B2Semiconductor device manufacturing method and semiconductor device manufacturing apparatusULVAC INC·Filed 2011·Granted Feb 5, 2013·6 cites·8 claims
- 3183US8366375B2Rotation introduction mechanism, substrate transfer apparatus, and vacuum processing apparatusULVAC INC·Filed 2007·Granted Feb 5, 2013·10 cites·13 claims
- 3283US7955043B2Substrate transfer apparatusULVAC INC·Filed 2007·Granted Jun 7, 2011·12 cites·5 claims
- 3383US7398685B2Measuring method using surface acoustic wave device, and surface acoustic wave device and biosensor deviceULVAC INC·Filed 2005·Granted Jul 15, 2008·12 cites·12 claims
- 3483US7201041B2Analysis method using piezoelectric resonatorULVAC INC·Filed 2006·Granted Apr 10, 2007·8 cites·7 claims
- 3582US7896968B2Winding type plasma CVD apparatusULVAC INC·Filed 2006·Granted Mar 1, 2011·6 cites·12 claims
- 3682US7033461B2Thin film forming apparatus and methodULVAC INC·Filed 2002·Granted Apr 25, 2006·24 cites·18 claims
- 3782US6700370B2Apparatus for measuring the thickness of a thin film having eddy current coil sensorULVAC INC·Filed 2001·Granted Mar 2, 2004·34 cites·12 claims
- 3882US6280585B1Sputtering apparatus for filling pores of a circular substrateULVAC INC·Filed 1997·Granted Aug 28, 2001·71 cites·2 claims
- 3981US9929526B2Contact type power feeding apparatusULVAC INC·Filed 2016·Granted Mar 27, 2018·2 cites·6 claims
- 4081US7572093B2Transport apparatus, control method for the same, and vacuum processing systemULVAC INC·Filed 2005·Granted Aug 11, 2009·8 cites·13 claims
- 4180US11891685B2Vacuum processing apparatusULVAC INC·Filed 2020·Granted Feb 6, 2024·1 cites·4 claims
- 4279US11384423B2Sputtering apparatus and sputtering methodULVAC INC·Filed 2019·Granted Jul 12, 2022·2 cites·9 claims
- 4379US10763153B2Holding apparatusULVAC INC·Filed 2017·Granted Sep 1, 2020·4 cites·6 claims
- 4479US10258947B2Mixing deviceULVAC INC·Filed 2017·Granted Apr 16, 2019·2 cites·15 claims
- 4579US7963631B2Printhead maintenance stationULVAC INC·Filed 2006·Granted Jun 21, 2011·6 cites·61 claims
- 4679US7918640B2Position correcting apparatus, vacuum processing equipment and position correcting methodULVAC INC·Filed 2007·Granted Apr 5, 2011·5 cites·14 claims
- 4779US7692120B2Transport robot and transport apparatusULVAC INC·Filed 2007·Granted Apr 6, 2010·6 cites·20 claims
- 4879US7111500B2Analysis method using piezoelectric resonatorULVAC INC·Filed 2003·Granted Sep 26, 2006·15 cites·6 claims
- 4978US8031183B2Touch panel and method for manufacturing touch panelULVAC INC·Filed 2010·Granted Oct 4, 2011·2 cites·2 claims
- 5078US6840732B2Transport apparatus and vacuum processing system using the sameULVAC INC·Filed 2001·Granted Jan 11, 2005·20 cites·6 claims
Showing the top 50 of 470 patent records by PatentIndex Score.
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