Assignee

ULVAC TECHNO LTD

JP·2 granted patents·0 citations·filing 2019–2019

Technology mixH01L2 H02N2 H10P2 B23Q1 G06F1

Top patents by PatentIndex Score

2 records

0143US11257702B2Power supply apparatus for electrostatic chuck and substrate control methodULVAC TECHNO LTD·Filed 2019·Granted Feb 22, 2022·0 cites·4 claims
0240US12020967B2Substrate lifting apparatus and substrate transferring methodULVAC TECHNO LTD·Filed 2019·Granted Jun 25, 2024·0 cites·4 claims

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