Assignee
UM PYUNG-YONG
KR·2 granted patents·3 pending applications·6 citations·filing 2003–2007
Top patents by PatentIndex Score
5 records- 0169US8585823B2CVD apparatus having a rotating heaterUM PYUNG-YONG·Filed 2006·Granted Nov 19, 2013·6 cites·12 claims
- 0242US2010243165A1Apparatus for surface-treating wafer using high-frequency inductively-coupled plasmaUM PYUNG-YONG·Filed 2007·Application pending·0 cites
- 0341US2009159001A1Shower head of chemical vapor deposition apparatusUM PYUNG-YONG·Filed 2005·Application pending·0 cites
- 0438US8876976B2Chemical vapor deposition apparatus for equalizing heating temperatureUM PYUNG-YONG·Filed 2007·Granted Nov 4, 2014·0 cites·8 claims
- 0529US2006144336A1Heater of chemical vapor deposition apparatus for manfuacturing a thin filmUM PYUNG YONG·Filed 2003·Application pending·0 cites
Join the waitlist — get patent alerts
Get an alert when UM PYUNG-YONG files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Counts cover granted patents and pending applications in the PatentIndex corpus. How scoring works →