Assignee
UNAXIS BALZERS AG
LI·80 granted patents·5 pending applications·2,147 citations·filing 1995–2005
Top patents by PatentIndex Score
85 records- 0198US6228438B1Plasma reactor for the treatment of large size substratesUNAXIS BALZERS AG·Filed 1999·Granted May 8, 2001·157 cites·3 claims
- 0297US6502530B1Design of gas injection for the electrode in a capacitively coupled RF plasma reactorUNAXIS BALZERS AG·Filed 2000·Granted Jan 7, 2003·537 cites·20 claims
- 0393US6873764B2Method for producing a grid structure, an optical element, an evanescence field sensor plate, microtitre plate and an optical communication engineering coupler as well as a device for monitoring a wavelengthUNAXIS BALZERS AG·Filed 2001·Granted Mar 29, 2005·58 cites·30 claims
- 0491US6510263B1Waveguide plate and process for its production and microtitre plateUNAXIS BALZERS AG·Filed 2000·Granted Jan 21, 2003·91 cites·11 claims
- 0590US6281469B1Capacitively coupled RF-plasma reactorUNAXIS BALZERS AG·Filed 1999·Granted Aug 28, 2001·67 cites·45 claims
- 0689US6899795B1Sputter chamber as well as vacuum transport chamber and vacuum handling apparatus with such chambersUNAXIS BALZERS AG·Filed 2000·Granted May 31, 2005·34 cites·11 claims
- 0787US6342970B1Dielectric interference filter system, LCD-display and CCD-arrangement as well as process for manufacturing a dielectric interference filter system and use of this processUNAXIS BALZERS AG·Filed 1997·Granted Jan 29, 2002·103 cites·23 claims
- 0886US6835414B2Method for producing coated substratesUNAXIS BALZERS AG·Filed 2001·Granted Dec 28, 2004·25 cites·57 claims
- 0985US6383573B1Process for manufacturing coated plastic bodyUNAXIS BALZERS AG·Filed 2000·Granted May 7, 2002·31 cites·20 claims
- 1085US6203637B1Use of a cleaning process, a cleaning process, a connection process and a workpiece pairUNAXIS BALZERS AG·Filed 1998·Granted Mar 20, 2001·49 cites·37 claims
- 1184US6821397B2Method for controlling plasma density or the distribution thereofUNAXIS BALZERS AG·Filed 2002·Granted Nov 23, 2004·16 cites·25 claims
- 1284US6619131B2Combination pressure sensor with capacitive and thermal elementsUNAXIS BALZERS AG·Filed 2002·Granted Sep 16, 2003·38 cites·23 claims
- 1383US6572738B1Vacuum treatment system and process for manufacturing workpiecesUNAXIS BALZERS AG·Filed 2000·Granted Jun 3, 2003·18 cites·46 claims
- 1482US6814838B2Vacuum treatment chamber and method for treating surfacesUNAXIS BALZERS AG·Filed 2001·Granted Nov 9, 2004·20 cites·28 claims
- 1582US6703081B2Installation and method for vacuum treatment or powder productionUNAXIS BALZERS AG·Filed 2002·Granted Mar 9, 2004·21 cites·25 claims
- 1682US6248219B1Process and apparatus for sputter etching or sputter coatingUNAXIS BALZERS AG·Filed 1995·Granted Jun 19, 2001·55 cites·25 claims
- 1781US6730194B2Method for manufacturing disk-shaped workpieces with a sputter stationUNAXIS BALZERS AG·Filed 2002·Granted May 4, 2004·21 cites·6 claims
- 1881US6558749B2Method for manufacturing a workpiece with wear-protective coatingUNAXIS BALZERS AG·Filed 2002·Granted May 6, 2003·20 cites·42 claims
- 1981US6351446B1Optical data storage diskUNAXIS BALZERS AG·Filed 1998·Granted Feb 26, 2002·45 cites·19 claims
- 2081US6296735B1Plasma treatment apparatus and method for operation sameUNAXIS BALZERS AG·Filed 1998·Granted Oct 2, 2001·80 cites·24 claims
- 2180US6602390B1Coating a workpiece and operating a cathodic arc dischargeUNAXIS BALZERS AG·Filed 1997·Granted Aug 5, 2003·46 cites·5 claims
- 2279US6550919B1Spectral light division and recombination configuration as well as process for the spectrally selective modulation of lightUNAXIS BALZERS AG·Filed 1999·Granted Apr 22, 2003·43 cites·32 claims
- 2378US7306829B2RF plasma reactor having a distribution chamber with at least one gridUNAXIS BALZERS AG·Filed 2002·Granted Dec 11, 2007·11 cites·6 claims
- 2476US6511543B1Holding deviceUNAXIS BALZERS AG·Filed 1998·Granted Jan 28, 2003·61 cites·22 claims
- 2576US6337001B1Process for sputter coating, a sputter coating source, and sputter coating apparatus with at least one such sourceUNAXIS BALZERS AG·Filed 1997·Granted Jan 8, 2002·44 cites·46 claims
- 2676US6274249B1Tool with tool body and protective layer systemUNAXIS BALZERS AG·Filed 1997·Granted Aug 14, 2001·42 cites·18 claims
- 2774US6620254B2Planetary system workpiece support and method for surface treatment of workpiecesUNAXIS BALZERS AG·Filed 2001·Granted Sep 16, 2003·16 cites·6 claims
- 2873US6922287B2Light coupling elementUNAXIS BALZERS AG·Filed 2001·Granted Jul 26, 2005·18 cites·51 claims
- 2973US6702931B2Method for manufacturing a cathodic arc coated workpieceUNAXIS BALZERS AG·Filed 2003·Granted Mar 9, 2004·10 cites·12 claims
- 3073US6476972B2Light splitter and optical transmitter configuration with a light splitterUNAXIS BALZERS AG·Filed 2001·Granted Nov 5, 2002·12 cites·41 claims
- 3170US6890862B2Processes for vacuum treating workpieces, and corresponding process equipmentUNAXIS BALZERS AG·Filed 2001·Granted May 10, 2005·10 cites·55 claims
- 3270US6844069B2Tool with tool body and protective layer systemUNAXIS BALZERS AG·Filed 2001·Granted Jan 18, 2005·12 cites·18 claims
- 3370US6804445B2Waveguide and process for the production thereofUNAXIS BALZERS AG·Filed 2003·Granted Oct 12, 2004·9 cites·29 claims
- 3470US6761772B2Workpiece supportUNAXIS BALZERS AG·Filed 2002·Granted Jul 13, 2004·17 cites·16 claims
- 3570US6673255B2Plasma treatment apparatus and method for operating sameUNAXIS BALZERS AG·Filed 2001·Granted Jan 6, 2004·17 cites·27 claims
- 3670US6605175B1Process for manufacturing component parts, use of same, with air bearing supported workpieces and vacuum processing chamberUNAXIS BALZERS AG·Filed 1999·Granted Aug 12, 2003·26 cites·41 claims
- 3770US6288844B1Light splitter and optical transmitter configuration with a light splitterUNAXIS BALZERS AG·Filed 1999·Granted Sep 11, 2001·30 cites·17 claims
- 3868US6627064B1Method for removing the hard material coating applied on a hard metal workpiece and a holding device for at least one workpieceUNAXIS BALZERS AG·Filed 2000·Granted Sep 30, 2003·7 cites·40 claims
- 3968US6275332B1Method of making high-reflection mirrorsUNAXIS BALZERS AG·Filed 2000·Granted Aug 14, 2001·12 cites·17 claims
- 4067US7070280B2Method for the generation of light of a given polarization stateUNAXIS BALZERS AG·Filed 2001·Granted Jul 4, 2006·14 cites·22 claims
- 4167US6669987B1Method for vacuum treatment of workpieces and vacuum treatment facilityUNAXIS BALZERS AG·Filed 2000·Granted Dec 30, 2003·9 cites·17 claims
- 4266US6818108B2Chamber for the transport of workpieces in a vacuum atmosphere, a chamber combination and a method for transporting a workpieceUNAXIS BALZERS AG·Filed 2001·Granted Nov 16, 2004·10 cites·23 claims
- 4362US7192483B2Method for diamond coating substratesUNAXIS BALZERS AG·Filed 2002·Granted Mar 20, 2007·6 cites·21 claims
- 4461US6533534B2Method for improving the rate of a plasma enhanced vacuum treatmentUNAXIS BALZERS AG·Filed 1999·Granted Mar 18, 2003·19 cites·1 claims
- 4560US6685994B1Coating workpiece method using beam of plasmaUNAXIS BALZERS AG·Filed 2000·Granted Feb 3, 2004·5 cites·29 claims
- 4658US6776882B2Method for producing a hybrid disk and hybrid disksUNAXIS BALZERS AG·Filed 2001·Granted Aug 17, 2004·3 cites·17 claims
- 4758US6645352B2Optical data storage diskUNAXIS BALZERS AG·Filed 2001·Granted Nov 11, 2003·4 cites·33 claims
- 4858US6364955B2Chamber, at least for the transport of workpieces, a chamber combination, a vacuum treatment facility as well as a transport methodUNAXIS BALZERS AG·Filed 2000·Granted Apr 2, 2002·4 cites·16 claims
- 4957US6781765B2Light splitting and recombining arrangementUNAXIS BALZERS AG·Filed 2002·Granted Aug 24, 2004·4 cites·63 claims
- 5057US6669170B2Vacuum valveUNAXIS BALZERS AG·Filed 2001·Granted Dec 30, 2003·13 cites·12 claims
Showing the top 50 of 85 patent records by PatentIndex Score.
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