Assignee
UNAXIS DEUTSCHLAND GMBH
DE·4 granted patents·2 pending applications·230 citations·filing 2001–2005
Top patents by PatentIndex Score
6 records- 0192US6849165B2Indium-tin oxide (ITO) layer and method for producing the sameUNAXIS DEUTSCHLAND GMBH·Filed 2001·Granted Feb 1, 2005·188 cites·18 claims
- 0286US6740207B2Electric supply unit and method for reducing arcing during sputteringUNAXIS DEUTSCHLAND GMBH·Filed 2002·Granted May 25, 2004·36 cites·33 claims
- 0358US6579424B2Method for the production of substrates, magnetron source and sputter-coating chamberUNAXIS DEUTSCHLAND GMBH·Filed 2001·Granted Jun 17, 2003·4 cites·11 claims
- 0447US2005217992A1Magnetron sputtering source and chamber thereforUNAXIS DEUTSCHLAND GMBH·Filed 2005·Application pending·0 cites
- 0545US7285342B2Indium-tin oxide (ITO) film and process for its productionUNAXIS DEUTSCHLAND GMBH·Filed 2004·Granted Oct 23, 2007·2 cites·21 claims
- 0638US2003201174A1Magnetron sputtering source and chamber thereforUNAXIS DEUTSCHLAND GMBH·Filed 2003·Application pending·0 cites
Join the waitlist — get patent alerts
Get an alert when UNAXIS DEUTSCHLAND GMBH files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Counts cover granted patents and pending applications in the PatentIndex corpus. How scoring works →