Assignee
UNAXIS DEUTSCHLAND HOLDING
DE·6 granted patents·104 citations·filing 1995–2002
Top patents by PatentIndex Score
6 records- 0177US6440281B1Device for the prevention of arcing in vacuum sputtering installationsUNAXIS DEUTSCHLAND HOLDING·Filed 1995·Granted Aug 27, 2002·35 cites·9 claims
- 0273US6511584B1Configuration for coating a substrate by means of a sputtering deviceUNAXIS DEUTSCHLAND HOLDING·Filed 1997·Granted Jan 28, 2003·30 cites·17 claims
- 0369US6436466B2Method for the operation of an electron beamUNAXIS DEUTSCHLAND HOLDING·Filed 2001·Granted Aug 20, 2002·10 cites·9 claims
- 0463US6487986B1Device for the plasma deposition of a polycrystalline diamondUNAXIS DEUTSCHLAND HOLDING·Filed 1999·Granted Dec 3, 2002·26 cites·2 claims
- 0551US6814839B2Interference layer systemUNAXIS DEUTSCHLAND HOLDING·Filed 2002·Granted Nov 9, 2004·1 cites·2 claims
- 0651US6743341B2Apparatus for applying thin layers to a substrateUNAXIS DEUTSCHLAND HOLDING·Filed 2002·Granted Jun 1, 2004·2 cites·7 claims
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