Assignee
UOZUMI YOSHIHIRO
JP·3 granted patents·1 pending application·27 citations·filing 2010–2012
Top patents by PatentIndex Score
4 records- 0190US9213242B2Substrate processing method and substrate processing apparatusUOZUMI YOSHIHIRO·Filed 2012·Granted Dec 15, 2015·9 cites·23 claims
- 0289US8222160B2Metal containing sacrifice material and method of damascene wiring formationUOZUMI YOSHIHIRO·Filed 2010·Granted Jul 17, 2012·11 cites·16 claims
- 0384US8211800B2Ru cap metal post cleaning method and cleaning chemicalUOZUMI YOSHIHIRO·Filed 2010·Granted Jul 3, 2012·7 cites·20 claims
- 0437US2012244690A1Ion implanted resist strip with superacidUOZUMI YOSHIHIRO·Filed 2011·Application pending·0 cites
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