Assignee
UP CHEMICAL CO LTD
KR·19 granted patents·9 pending applications·17 citations·filing 2006–2023
Top patents by PatentIndex Score
28 records- 0192US9957614B2Ruthenium compound, preparation method therefor, precursor composition for film deposition containing same, and method for depositing film by using sameUP CHEMICAL CO LTD·Filed 2015·Granted May 1, 2018·5 cites·12 claims
- 0289US10131680B1Group 4 metal element-containing alkoxy compound, preparing method thereof, precursor composition including the same for film deposition, and method of depositing film using the sameUP CHEMICAL CO LTD·Filed 2017·Granted Nov 20, 2018·3 cites·7 claims
- 0381US11912728B2Aluminum compounds and methods of forming aluminum- containing film using the sameUP CHEMICAL CO LTD·Filed 2021·Granted Feb 27, 2024·1 cites·11 claims
- 0481US11485749B2Group 4 metal element-containing compounds, method of preparing the same, precursor compositions including the same for forming a film, and method of forming a film using the sameUP CHEMICAL CO LTD·Filed 2020·Granted Nov 1, 2022·1 cites·8 claims
- 0580US9255324B2Aluminum precursor compositionUP CHEMICAL CO LTD·Filed 2013·Granted Feb 9, 2016·2 cites·11 claims
- 0679US10005795B1Group 4 metal element-containing compound, method of preparing the same, precursor composition including the same for depositing film, and method of depositing film using the sameUP CHEMICAL CO LTD·Filed 2017·Granted Jun 26, 2018·1 cites·10 claims
- 0775US12522626B2Thermally stable ruthenium precursor composition, and method for forming ruthenium-containing filmUP CHEMICAL CO LTD·Filed 2023·Granted Jan 13, 2026·0 cites·9 claims
- 0875US7985450B2Method for thin film vapor deposition of a dialkyl amido dihydroaluminum compoundUP CHEMICAL CO LTD·Filed 2006·Granted Jul 26, 2011·3 cites·4 claims
- 0972US12428435B2Aluminum precursor compound, production method therefor, and aluminum containing layer forming method using sameUP CHEMICAL CO LTD·Filed 2022·Granted Sep 30, 2025·0 cites·11 claims
- 1072US12319705B2Ruthenium precursor composition, preparation method therefor, and formation method for ruthenium-containing film using sameUP CHEMICAL CO LTD·Filed 2023·Granted Jun 3, 2025·0 cites·22 claims
- 1169US10287681B2Copper metal film, method for preparing the same, and method for forming copper interconnect for semiconductor device using the sameUP CHEMICAL CO LTD·Filed 2016·Granted May 14, 2019·1 cites·19 claims
- 1266US2026085419A1Molybdenum precursor compound, method for producing same, and method for depositing molybdenum-containing thin film using sameUP CHEMICAL CO LTD·Filed 2023·Application pending·0 cites
- 1365US9431144B2Indium-containing oxide film and preparing method thereofUP CHEMICAL CO LTD·Filed 2014·Granted Aug 30, 2016·0 cites·10 claims
- 1462US12522921B2Yttrium/lanthanide metal precursor compound, composition for forming film including the same, and method of forming yttrium/lanthanide metal-containing film using the sameUP CHEMICAL CO LTD·Filed 2022·Granted Jan 13, 2026·0 cites·5 claims
- 1562US12410201B2Silicon precursor compound, silicon-containing film formation composition comprising same, and method for forming film by using silicon-containing film formation compositionUP CHEMICAL CO LTD·Filed 2022·Granted Sep 9, 2025·0 cites·7 claims
- 1659US2025066405A1Molybdenum precursor compound, method for preparing same, and method for depositing molybdenum-containing film using sameUP CHEMICAL CO LTD·Filed 2022·Application pending·0 cites
- 1759US2023383405A1Hafnium precursor compound, composition for forming hafnium-containing film, comprising same, and method for forming hafnium-containing filmUP CHEMICAL CO LTD·Filed 2023·Application pending·0 cites
- 1857US10763001B2Liquid precursor compositions, preparation methods thereof, and methods for forming layer using the compositionUP CHEMICAL CO LTD·Filed 2018·Granted Sep 1, 2020·0 cites·10 claims
- 1956US2016122867A1Deposition method for tungsten-containing film using tungsten compound, and precursor composition for depositing tungsten-containing film, comprising tungsten compoundUP CHEMICAL CO LTD·Filed 2014·Application pending·0 cites
- 2055US2022396592A1Silicon precursor compound, composition for forming silicon-containing film including the same, and method of forming silicon-containing filmUP CHEMICAL CO LTD·Filed 2022·Application pending·0 cites
- 2153US11905305B2Silicon precursor compound, preparation method therefor, and silicon-containing film formation method using sameUP CHEMICAL CO LTD·Filed 2021·Granted Feb 20, 2024·0 cites·17 claims
- 2253US10014089B2Liquid precursor compositions, preparation methods thereof, and methods for forming layer using the compositionUP CHEMICAL CO LTD·Filed 2016·Granted Jul 3, 2018·0 cites·13 claims
- 2348US10577385B2Group 5 metal compound, method for preparing the same, precursor composition for depositing layer containing the same, and method for depositing layer using the sameUP CHEMICAL CO LTD·Filed 2019·Granted Mar 3, 2020·0 cites·12 claims
- 2448US2025109496A1Film depositing composition including group 4 metal element-containing precursor compound and method for forming film using sameUP CHEMICAL CO LTD·Filed 2023·Application pending·0 cites
- 2546US2024376599A1Silicon precursor compound, composition for forming silicon-containing film comprising same, and method for forming film using composition for forming silicon-containing filmUP CHEMICAL CO LTD·Filed 2022·Application pending·0 cites
- 2646US2024318305A1Method for forming silicon-containing film, and silicon-containing film formed therebyUP CHEMICAL CO LTD·Filed 2022·Application pending·0 cites
- 2739US10290493B2Method for manufacturing silicon-containing thin filmUP CHEMICAL CO LTD·Filed 2015·Granted May 14, 2019·0 cites·14 claims
- 2832US2016326008A1Indium-containing film and composition for forming the sameUP CHEMICAL CO LTD·Filed 2016·Application pending·0 cites
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