Assignee
UTSUMI TAKAO
JP·2 granted patents·2 pending applications·1 citations·filing 2013–2020
Top patents by PatentIndex Score
4 records- 0158US9557658B2Low energy electron beam lithographyUTSUMI TAKAO·Filed 2015·Granted Jan 31, 2017·1 cites·19 claims
- 0247US10950441B1Low energy e-beam contact printing lithographyUTSUMI TAKAO·Filed 2020·Granted Mar 16, 2021·0 cites·36 claims
- 0337US2021060924A1Low energy e-beam contact printing lithographyUTSUMI TAKAO·Filed 2019·Application pending·0 cites
- 0430US2015146179A1Low energy electron beam lithographyUTSUMI TAKAO·Filed 2013·Application pending·0 cites
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Counts cover granted patents and pending applications in the PatentIndex corpus. How scoring works →