Assignee
UTSUMI YOSHIYUKI
JP·17 granted patents·39 citations·filing 2007–2012
Top patents by PatentIndex Score
17 records- 0193US8415082B2Resist composition, method of forming resist pattern, compound and method of producing the same, acid generatorUTSUMI YOSHIYUKI·Filed 2010·Granted Apr 9, 2013·8 cites·7 claims
- 0291US8765354B2Resist composition for negative development and method of forming resist patternUTSUMI YOSHIYUKI·Filed 2012·Granted Jul 1, 2014·7 cites·7 claims
- 0386US8765352B2Resist composition, method of forming resist pattern, novel compound, and acid generatorUTSUMI YOSHIYUKI·Filed 2011·Granted Jul 1, 2014·4 cites·9 claims
- 0485US8987386B2Method of producing polymeric compound, resist composition, and method of forming resist patternUTSUMI YOSHIYUKI·Filed 2012·Granted Mar 24, 2015·5 cites·4 claims
- 0585US8846291B2Resist composition, method of forming resist pattern, and new compoundUTSUMI YOSHIYUKI·Filed 2011·Granted Sep 30, 2014·5 cites·12 claims
- 0675US8497395B2CompoundUTSUMI YOSHIYUKI·Filed 2011·Granted Jul 30, 2013·1 cites·1 claims
- 0773US8105747B2Positive resist composition and method of forming resist patternUTSUMI YOSHIYUKI·Filed 2007·Granted Jan 31, 2012·4 cites·10 claims
- 0872US8268530B2Positive resist composition, method of forming resist pattern, polymeric compound, and compoundUTSUMI YOSHIYUKI·Filed 2010·Granted Sep 18, 2012·2 cites·12 claims
- 0968US8247160B2Resist composition, method of forming resist pattern, and novel compound and acid generatorUTSUMI YOSHIYUKI·Filed 2009·Granted Aug 21, 2012·2 cites·14 claims
- 1061US8519073B2Compound and polymeric compoundUTSUMI YOSHIYUKI·Filed 2007·Granted Aug 27, 2013·1 cites·7 claims
- 1149US8609320B2Resist composition, method of forming resist pattern, polymeric compound and compoundUTSUMI YOSHIYUKI·Filed 2011·Granted Dec 17, 2013·0 cites·14 claims
- 1246US8900788B2Resist composition for immersion exposure and method of forming resist patternUTSUMI YOSHIYUKI·Filed 2007·Granted Dec 2, 2014·0 cites·9 claims
- 1343US9097971B2Compound, radical polymerization initiator, method for producing compound, polymer, resist composition, and method for forming resist patternUTSUMI YOSHIYUKI·Filed 2012·Granted Aug 4, 2015·0 cites·4 claims
- 1443US8614049B2Resist composition and method of forming resist patternUTSUMI YOSHIYUKI·Filed 2011·Granted Dec 24, 2013·0 cites·6 claims
- 1541US8252509B2Resist composition and method of forming resist patternUTSUMI YOSHIYUKI·Filed 2010·Granted Aug 28, 2012·0 cites·7 claims
- 1638US9618842B2Resist composition and method of forming resist patternUTSUMI YOSHIYUKI·Filed 2010·Granted Apr 11, 2017·0 cites·3 claims
- 1735US9017919B2Resist composition, method of forming resist pattern, novel compound and acid generatorUTSUMI YOSHIYUKI·Filed 2011·Granted Apr 28, 2015·0 cites·9 claims
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