Assignee
VACUUM METALLURG CO LTD
US·12 granted patents·327 citations·filing 1991–2002
Top patents by PatentIndex Score
12 records- 0176US6235118B1Method for forming a thin film of ultra-fine particles, and an apparatus for the sameVACUUM METALLURG CO LTD·Filed 2000·Granted May 22, 2001·15 cites·8 claims
- 0275US5966580AProcess for making a thin film using a metal pasteVACUUM METALLURG CO LTD·Filed 1997·Granted Oct 12, 1999·41 cites·3 claims
- 0375US5587111AMetal paste, process for producing same and method of making a metallic thin film using the metal pasteVACUUM METALLURG CO LTD·Filed 1991·Granted Dec 24, 1996·43 cites·8 claims
- 0472US5750194AProcess for producing a metal pasteVACUUM METALLURG CO LTD·Filed 1996·Granted May 12, 1998·36 cites·4 claims
- 0570US6214259B1Dispersion containing Cu ultrafine particles individually dispersed thereinVACUUM METALLURG CO LTD·Filed 1999·Granted Apr 10, 2001·40 cites·19 claims
- 0670US5953629AMethod of thin film forming on semiconductor substrateVACUUM METALLURG CO LTD·Filed 1996·Granted Sep 14, 1999·43 cites·6 claims
- 0770US5536324AUltra fine particle gas deposition apparatusVACUUM METALLURG CO LTD·Filed 1994·Granted Jul 16, 1996·29 cites·8 claims
- 0869US6791188B2Thin film aluminum alloy and sputtering target to form the sameVACUUM METALLURG CO LTD·Filed 2002·Granted Sep 14, 2004·22 cites·6 claims
- 0965US5837316AUltra fine particle gas deposition apparatusVACUUM METALLURG CO LTD·Filed 1995·Granted Nov 17, 1998·27 cites·3 claims
- 1050US6106890AMethod for forming a thin film of ultra-fine particles and an apparatus for the sameVACUUM METALLURG CO LTD·Filed 1996·Granted Aug 22, 2000·13 cites·10 claims
- 1145US6723213B2Titanium target assembly for sputtering and method for preparing the sameVACUUM METALLURG CO LTD·Filed 2002·Granted Apr 20, 2004·6 cites·9 claims
- 1244US6194316B1Method for forming CU-thin filmVACUUM METALLURG CO LTD·Filed 1999·Granted Feb 27, 2001·12 cites·10 claims
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Counts cover granted patents and pending applications in the PatentIndex corpus. How scoring works →