Assignee
VALCORE JR JOHN C
US·14 granted patents·1 pending application·267 citations·filing 2009–2013
Top patents by PatentIndex Score
15 records- 0198US8501631B2Plasma processing system control based on RF voltageVALCORE JR JOHN C·Filed 2010·Granted Aug 6, 2013·31 cites·20 claims
- 0297US9320126B2Determining a value of a variable on an RF transmission modelVALCORE JR JOHN C·Filed 2012·Granted Apr 19, 2016·47 cites·20 claims
- 0397US9171699B2Impedance-based adjustment of power and frequencyVALCORE JR JOHN C·Filed 2012·Granted Oct 27, 2015·24 cites·11 claims
- 0497US9114666B2Methods and apparatus for controlling plasma in a plasma processing systemVALCORE JR JOHN C·Filed 2012·Granted Aug 25, 2015·37 cites·29 claims
- 0597US8901935B2Methods and apparatus for detecting the confinement state of plasma in a plasma processing systemVALCORE JR JOHN C·Filed 2010·Granted Dec 2, 2014·31 cites·17 claims
- 0696US9408288B2Edge rampingVALCORE JR JOHN C·Filed 2012·Granted Aug 2, 2016·27 cites·23 claims
- 0796US9368329B2Methods and apparatus for synchronizing RF pulses in a plasma processing systemVALCORE JR JOHN C·Filed 2012·Granted Jun 14, 2016·24 cites·27 claims
- 0894US9197196B2State-based adjustment of power and frequencyVALCORE JR JOHN C·Filed 2012·Granted Nov 24, 2015·17 cites·4 claims
- 0992US9502216B2Using modeling to determine wafer bias associated with a plasma systemVALCORE JR JOHN C·Filed 2013·Granted Nov 22, 2016·11 cites·35 claims
- 1084US8909365B2Methods and apparatus for controlling a plasma processing systemVALCORE JR JOHN C·Filed 2010·Granted Dec 9, 2014·6 cites·19 claims
- 1181US9043525B2Optimizing a rate of transfer of data between an RF generator and a host system within a plasma toolVALCORE JR JOHN C·Filed 2012·Granted May 26, 2015·6 cites·23 claims
- 1268US8797705B2Methods and arrangement for plasma dechuck optimization based on coupling of plasma signaling to substrate position and potentialVALCORE JR JOHN C·Filed 2009·Granted Aug 5, 2014·3 cites·20 claims
- 1365US8440061B2System and method for plasma arc detection, isolation and preventionVALCORE JR JOHN C·Filed 2009·Granted May 14, 2013·2 cites·7 claims
- 1461US9155182B2Tuning a parameter associated with plasma impedanceVALCORE JR JOHN C·Filed 2013·Granted Oct 6, 2015·1 cites·10 claims
- 1544US2011060442A1Methods and arrangement for detecting a wafer-released event within a plasma processing chamberVALCORE JR JOHN C·Filed 2009·Application pending·0 cites
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