Assignee
VAN BOKHOVEN LAURENTIUS JOHANNES ADRIANUS
NL·2 granted patents·0 citations·filing 2010–2011
Technology mixG03F2
Top patents by PatentIndex Score
2 records- 0145US8848164B2Fluid supply system, a lithographic apparatus, a method of varying fluid flow rate and a device manufacturing methodVAN BOKHOVEN LAURENTIUS JOHANNES ADRIANUS·Filed 2011·Granted Sep 30, 2014·0 cites·21 claims
- 0233US8405819B2Immersion lithographic apparatus and device manufacturing methodVAN BOKHOVEN LAURENTIUS JOHANNES ADRIANUS·Filed 2010·Granted Mar 26, 2013·0 cites·22 claims
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