Assignee
VAN DAM MARINUS JOHANNES MARIA
NL·2 granted patents·7 citations·filing 2006–2008
Top patents by PatentIndex Score
2 records- 0179US8218130B2Device manufacturing method and lithographic apparatus,and computer program productVAN DAM MARINUS JOHANNES MARIA·Filed 2008·Granted Jul 10, 2012·7 cites·15 claims
- 0242US8675176B2Parameter control in a lithographic apparatus using polarizationVAN DAM MARINUS JOHANNES MARIA·Filed 2006·Granted Mar 18, 2014·0 cites·21 claims
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