Assignee
VAN DE KERKHOF MARCUS ADRIANUS
NL·14 granted patents·1 pending application·146 citations·filing 2006–2012
Top patents by PatentIndex Score
15 records- 0198US8724087B2Inspection apparatus for lithographyVAN DE KERKHOF MARCUS ADRIANUS·Filed 2009·Granted May 13, 2014·87 cites·19 claims
- 0295US8786825B2Apparatus and method of measuring a property of a substrateVAN DE KERKHOF MARCUS ADRIANUS·Filed 2009·Granted Jul 22, 2014·30 cites·25 claims
- 0392US9182678B2Lithographic apparatus and device manufacturing methodVAN DE KERKHOF MARCUS ADRIANUS·Filed 2012·Granted Nov 10, 2015·6 cites·20 claims
- 0489US9482967B2Lithographic apparatus, control system and device manufacturing methodVAN DE KERKHOF MARCUS ADRIANUS·Filed 2011·Granted Nov 1, 2016·6 cites·21 claims
- 0586US8233134B2Lithographic apparatus and device manufacturing methodVAN DE KERKHOF MARCUS ADRIANUS·Filed 2008·Granted Jul 31, 2012·6 cites·18 claims
- 0676US8988658B2Inspection apparatus to detect a target located within a pattern for lithographyVAN DE KERKHOF MARCUS ADRIANUS·Filed 2009·Granted Mar 24, 2015·3 cites·20 claims
- 0772US8773637B2Lithographic apparatus and device manufacturing method of applying a pattern to a substrate using sensor and alignment markVAN DE KERKHOF MARCUS ADRIANUS·Filed 2010·Granted Jul 8, 2014·2 cites·16 claims
- 0866US8547522B2Dedicated metrology stage for lithography applicationsVAN DE KERKHOF MARCUS ADRIANUS·Filed 2009·Granted Oct 1, 2013·3 cites·10 claims
- 0966US8068212B2Lithographic apparatus configured to compensate for variations in a critical dimension of projected features due to heating of optical elementsVAN DE KERKHOF MARCUS ADRIANUS·Filed 2010·Granted Nov 29, 2011·2 cites·15 claims
- 1065US9201310B2Method of measuring overlay error and a device manufacturing methodVAN DE KERKHOF MARCUS ADRIANUS·Filed 2009·Granted Dec 1, 2015·1 cites·17 claims
- 1155US9229338B2Substrate, a method of measuring a property, an inspection apparatus and a lithographic apparatusVAN DE KERKHOF MARCUS ADRIANUS·Filed 2009·Granted Jan 5, 2016·0 cites·5 claims
- 1252US8896817B2Lithographic projection apparatus, device manufacturing methods and mask with sensor and diffuser for use in a device manufacturing methodVAN DE KERKHOF MARCUS ADRIANUS·Filed 2006·Granted Nov 25, 2014·0 cites·7 claims
- 1352US8629418B2Lithographic apparatus and sensor thereforVAN DE KERKHOF MARCUS ADRIANUS·Filed 2006·Granted Jan 14, 2014·0 cites·23 claims
- 1450US8988653B2Lithographic apparatus, distortion determining method, and patterning deviceVAN DE KERKHOF MARCUS ADRIANUS·Filed 2010·Granted Mar 24, 2015·0 cites·32 claims
- 1539US2010118288A1Lithographic projection system and projection lens polarization sensorVAN DE KERKHOF MARCUS ADRIANUS·Filed 2006·Application pending·0 cites
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