Assignee
VAN DER SCHAAR MAURITS
NL·7 granted patents·39 citations·filing 2008–2012
Top patents by PatentIndex Score
7 records- 0195US8111398B2Method of measurement, an inspection apparatus and a lithographic apparatusVAN DER SCHAAR MAURITS·Filed 2010·Granted Feb 7, 2012·21 cites·21 claims
- 0290US8064056B2Substrate used in a method and apparatus for angular-resolved spectroscopic lithography characterizationVAN DER SCHAAR MAURITS·Filed 2011·Granted Nov 22, 2011·6 cites·9 claims
- 0376US8709687B2Substrate and patterning device for use in metrology, metrology method and device manufacturing methodVAN DER SCHAAR MAURITS·Filed 2012·Granted Apr 29, 2014·3 cites·6 claims
- 0475US9235141B2Inspection apparatus and method for measuring a property of a substrateVAN DER SCHAAR MAURITS·Filed 2011·Granted Jan 12, 2016·2 cites·15 claims
- 0571US9746785B2Sub-wavelength segmentation in measurement targets on substratesVAN DER SCHAAR MAURITS·Filed 2009·Granted Aug 29, 2017·5 cites·21 claims
- 0669US8982329B2Method and apparatus for measuring line end shortening, substrate and patterning deviceVAN DER SCHAAR MAURITS·Filed 2009·Granted Mar 17, 2015·2 cites·13 claims
- 0756US8264664B2Method for producing a marker on a substrate, lithographic apparatus and device manufacturing methodVAN DER SCHAAR MAURITS·Filed 2008·Granted Sep 11, 2012·0 cites·10 claims
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