Assignee
VAN EIJK JAN
NL·4 granted patents·7 citations·filing 2009–2012
Top patents by PatentIndex Score
4 records- 0187US8482719B2Positioning system, lithographic apparatus and methodVAN EIJK JAN·Filed 2010·Granted Jul 9, 2013·6 cites·16 claims
- 0264US9019470B2Lithographic apparatus, and patterning device for use in a lithographic processVAN EIJK JAN·Filed 2009·Granted Apr 28, 2015·1 cites·17 claims
- 0351US8982359B2System for detecting motion, lithographic apparatus and device manufacturing methodVAN EIJK JAN·Filed 2012·Granted Mar 17, 2015·0 cites·17 claims
- 0440US8441616B2Lithographic apparatus and device manufacturing methodVAN EIJK JAN·Filed 2010·Granted May 14, 2013·0 cites·10 claims
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