Assignee
VAN EMPEL TJARKO ADRIAAN RUDOLF
NL·6 granted patents·10 citations·filing 2008–2010
Top patents by PatentIndex Score
6 records- 0177US8451429B2Dichroic mirror, method for manufacturing a dichroic mirror, lithographic apparatus, semiconductor device and method of manufacturing thereforVAN EMPEL TJARKO ADRIAAN RUDOLF·Filed 2009·Granted May 28, 2013·6 cites·15 claims
- 0257US8218128B2Lithographic apparatus and device manufacturing method incorporating a pressure shieldVAN EMPEL TJARKO ADRIAAN RUDOLF·Filed 2009·Granted Jul 10, 2012·0 cites·11 claims
- 0356US8901521B2Module and method for producing extreme ultraviolet radiationVAN EMPEL TJARKO ADRIAAN RUDOLF·Filed 2008·Granted Dec 2, 2014·3 cites·31 claims
- 0454US8094287B2Lithographic appararus and methodVAN EMPEL TJARKO ADRIAAN RUDOLF·Filed 2008·Granted Jan 10, 2012·0 cites·18 claims
- 0547US8072575B2Lithographic apparatus with temperature sensor and device manufacturing methodVAN EMPEL TJARKO ADRIAAN RUDOLF·Filed 2009·Granted Dec 6, 2011·1 cites·13 claims
- 0638US9766558B2Lithographic apparatus with flexible transportation line having varying stiffness between two objectsVAN EMPEL TJARKO ADRIAAN RUDOLF·Filed 2010·Granted Sep 19, 2017·0 cites·15 claims
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