Assignee
VAN SCHOOT JAN BERNARD PLECHELMUS
NL·4 granted patents·2 pending applications·12 citations·filing 2008–2012
Top patents by PatentIndex Score
6 records- 0185US9170500B2Lithographic apparatus and device manufacturing method with corrective positioning of reflective elementVAN SCHOOT JAN BERNARD PLECHELMUS·Filed 2010·Granted Oct 27, 2015·10 cites·10 claims
- 0261US9632419B2Radiation sourceVAN SCHOOT JAN BERNARD PLECHELMUS·Filed 2012·Granted Apr 25, 2017·2 cites·23 claims
- 0348US8570489B2Lithographic projection apparatus and method of compensating perturbation factorsVAN SCHOOT JAN BERNARD PLECHELMUS·Filed 2008·Granted Oct 29, 2013·0 cites·24 claims
- 0445US8830444B2Lithographic apparatus and methodVAN SCHOOT JAN BERNARD PLECHELMUS·Filed 2011·Granted Sep 9, 2014·0 cites·15 claims
- 0540US2013077073A1Methods to control euv exposure dose and euv lithographic methods and apparatus using such methodsVAN SCHOOT JAN BERNARD PLECHELMUS·Filed 2012·Application pending·0 cites
- 0636US2012105818A1Lithographic apparatus and methodVAN SCHOOT JAN BERNARD PLECHELMUS·Filed 2010·Application pending·0 cites
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