Assignee
VAN SCHRAVENDIJK BART
US·2 granted patents·2 pending applications·590 citations·filing 2007–2010
Top patents by PatentIndex Score
4 records- 0195US8133797B2Protective layer to enable damage free gap fillVAN SCHRAVENDIJK BART·Filed 2008·Granted Mar 13, 2012·78 cites·23 claims
- 0293US8242028B1UV treatment of etch stop and hard mask films for selectivity and hermeticity enhancementVAN SCHRAVENDIJK BART·Filed 2007·Granted Aug 14, 2012·512 cites·20 claims
- 0345US2011045610A1Uv treatment for carbon-containing low-k dielectric repair in semiconductor processingVAN SCHRAVENDIJK BART·Filed 2010·Application pending·0 cites
- 0436US2010267231A1Apparatus for uv damage repair of low k films prior to copper barrier depositionVAN SCHRAVENDIJK BART·Filed 2010·Application pending·0 cites
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