Assignee
VANGUARD INT SEMICONDUCTOR SINGAPORE PTE LTD
SG·21 granted patents·25 citations·filing 2016–2022
Top patents by PatentIndex Score
21 records- 0189US10988376B2Monolithic integration of piezoelectric micromachined ultrasonic transducers and CMOS and method for producing the sameVANGUARD INT SEMICONDUCTOR SINGAPORE PTE LTD·Filed 2017·Granted Apr 27, 2021·4 cites·8 claims
- 0286US11267696B2MEMS devices and methods of forming thereofVANGUARD INT SEMICONDUCTOR SINGAPORE PTE LTD·Filed 2019·Granted Mar 8, 2022·3 cites·9 claims
- 0384US10793421B2Wafer level encapsulation for MEMS deviceVANGUARD INT SEMICONDUCTOR SINGAPORE PTE LTD·Filed 2017·Granted Oct 6, 2020·6 cites·12 claims
- 0480US11329098B2Piezoelectric micromachined ultrasonic transducers and methods for fabricating thereofVANGUARD INT SEMICONDUCTOR SINGAPORE PTE LTD·Filed 2018·Granted May 10, 2022·2 cites·19 claims
- 0577US11233496B2Acoustic resonator and filter with electrode having zig-zag edge and method for producing the sameVANGUARD INT SEMICONDUCTOR SINGAPORE PTE LTD·Filed 2018·Granted Jan 25, 2022·2 cites·9 claims
- 0675US10811361B2Seal ring bonding structuresVANGUARD INT SEMICONDUCTOR SINGAPORE PTE LTD·Filed 2018·Granted Oct 20, 2020·5 cites·20 claims
- 0774US11785852B2Microphone device with single crystal piezoelectric film and method of forming the sameVANGUARD INT SEMICONDUCTOR SINGAPORE PTE LTD·Filed 2022·Granted Oct 10, 2023·0 cites·8 claims
- 0873US10723614B2Devices with localized strain and stress tuningVANGUARD INT SEMICONDUCTOR SINGAPORE PTE LTD·Filed 2017·Granted Jul 28, 2020·1 cites·9 claims
- 0972US11185886B2Microelectromechanical systems, devices, and methods for fabricating a microelectromechanical systems device, and methods for generating a plurality of frequenciesVANGUARD INT SEMICONDUCTOR SINGAPORE PTE LTD·Filed 2018·Granted Nov 30, 2021·2 cites·17 claims
- 1071US11767217B2MEMS devices and methods of forming thereofVANGUARD INT SEMICONDUCTOR SINGAPORE PTE LTD·Filed 2022·Granted Sep 26, 2023·0 cites·9 claims
- 1165US11286157B2Methods for packaging a microelectromechanical systems deviceVANGUARD INT SEMICONDUCTOR SINGAPORE PTE LTD·Filed 2020·Granted Mar 29, 2022·0 cites·10 claims
- 1264US11527700B2Microphone device with single crystal piezoelectric film and method of forming the sameVANGUARD INT SEMICONDUCTOR SINGAPORE PTE LTD·Filed 2019·Granted Dec 13, 2022·0 cites·11 claims
- 1363US10793422B2Microelectromechanical systems packages and methods for packaging a microelectromechanical systems deviceVANGUARD INT SEMICONDUCTOR SINGAPORE PTE LTD·Filed 2018·Granted Oct 6, 2020·0 cites·9 claims
- 1462US12037239B2Method for producing monolithic integration of piezoelectric micromachined ultrasonic transducers and CMOSVANGUARD INT SEMICONDUCTOR SINGAPORE PTE LTD·Filed 2021·Granted Jul 16, 2024·0 cites·10 claims
- 1561US11963452B2Method of making piezoelectric microphone with deflection controlVANGUARD INT SEMICONDUCTOR SINGAPORE PTE LTD·Filed 2020·Granted Apr 16, 2024·0 cites·10 claims
- 1661US11549913B2Shear-mode chemical/physical sensor for liquid environment sensing and method for producing the sameVANGUARD INT SEMICONDUCTOR SINGAPORE PTE LTD·Filed 2018·Granted Jan 10, 2023·0 cites·20 claims
- 1756US10886455B2Piezoelectric microphone with deflection control and method of making the sameVANGUARD INT SEMICONDUCTOR SINGAPORE PTE LTD·Filed 2017·Granted Jan 5, 2021·0 cites·5 claims
- 1854US11813639B2Electrode arrangement for a pMUT and pMUT transducer arrayVANGUARD INT SEMICONDUCTOR SINGAPORE PTE LTD·Filed 2016·Granted Nov 14, 2023·0 cites·12 claims
- 1950US10892730B2Acoustic filter with packaging-defined boundary conditions and method for producing the sameVANGUARD INT SEMICONDUCTOR SINGAPORE PTE LTD·Filed 2018·Granted Jan 12, 2021·0 cites·10 claims
- 2045US11575081B2MEMS structures and methods of forming MEMS structuresVANGUARD INT SEMICONDUCTOR SINGAPORE PTE LTD·Filed 2019·Granted Feb 7, 2023·0 cites·20 claims
- 2137US10784833B2Lamb acoustic wave resonator and filter with self-aligned cavity viaVANGUARD INT SEMICONDUCTOR SINGAPORE PTE LTD·Filed 2017·Granted Sep 22, 2020·0 cites·9 claims
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