Assignee
VARADARAJAN BHADRI
US·5 granted patents·90 citations·filing 2004–2012
Top patents by PatentIndex Score
5 records- 0197US10211310B2Remote plasma based deposition of SiOC class of filmsVARADARAJAN BHADRI·Filed 2012·Granted Feb 19, 2019·20 cites·14 claims
- 0294US8512818B1Cascaded cure approach to fabricate highly tensile silicon nitride filmsVARADARAJAN BHADRI·Filed 2012·Granted Aug 20, 2013·21 cites·18 claims
- 0394US8211510B1Cascaded cure approach to fabricate highly tensile silicon nitride filmsVARADARAJAN BHADRI·Filed 2007·Granted Jul 3, 2012·33 cites·25 claims
- 0481US10037905B2UV and reducing treatment for K recovery and surface clean in semiconductor processingVARADARAJAN BHADRI·Filed 2009·Granted Jul 31, 2018·7 cites·5 claims
- 0563US9659769B1Tensile dielectric films using UV curingVARADARAJAN BHADRI·Filed 2004·Granted May 23, 2017·9 cites·35 claims
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