Assignee

VARIAN SEMICONDUCTOR ASSOCIATE

US·1 granted patent·10 citations·filing 2006–2006

Technology mixG01J1 H01J1 H10P1

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0179US7453070B2Methods and apparatus for beam density measurement in two dimensionsVARIAN SEMICONDUCTOR ASSOCIATE·Filed 2006·Granted Nov 18, 2008·10 cites·20 claims

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