Assignee
VARIAN SEMICONDUCTOR EQUIPMENT
US·354 granted patents·116 pending applications·5,484 citations·filing 1995–2015
Top patents by PatentIndex Score
470 records- 0198US7767977B1Ion sourceVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2009·Granted Aug 3, 2010·72 cites·16 claims
- 0298US6079927AAutomated wafer buffer for use with wafer processing equipmentVARIAN SEMICONDUCTOR EQUIPMENT·Filed 1998·Granted Jun 27, 2000·539 cites·28 claims
- 0397US8926850B2Plasma processing with enhanced charge neutralization and process controlVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2012·Granted Jan 6, 2015·59 cites·20 claims
- 0496US9230773B1Ion beam uniformity controlVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2014·Granted Jan 5, 2016·20 cites·11 claims
- 0596US7888653B2Techniques for independently controlling deflection, deceleration and focus of an ion beamVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2009·Granted Feb 15, 2011·33 cites·28 claims
- 0696US7727866B2Use of chained implants in solar cellsVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2009·Granted Jun 1, 2010·53 cites·20 claims
- 0796US7655931B2Techniques for improving the performance and extending the lifetime of an ion source with gas mixingVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2007·Granted Feb 2, 2010·46 cites·23 claims
- 0896US7586109B2Technique for improving the performance and extending the lifetime of an ion source with gas dilutionVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2007·Granted Sep 8, 2009·41 cites·21 claims
- 0996US6437350B1Methods and apparatus for adjusting beam parallelism in ion implantersVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2000·Granted Aug 20, 2002·67 cites·26 claims
- 1096US6323497B1Method and apparatus for controlling ion implantation during vacuum fluctuationVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2000·Granted Nov 27, 2001·73 cites·15 claims
- 1196US6020592ADose monitor for plasma doping systemVARIAN SEMICONDUCTOR EQUIPMENT·Filed 1998·Granted Feb 1, 2000·155 cites·40 claims
- 1295US9337040B1Angled ion beam processing of heterogeneous structureVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2015·Granted May 10, 2016·12 cites·17 claims
- 1395US8864202B1Spring retained end effector contact padVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2013·Granted Oct 21, 2014·544 cites·20 claims
- 1495US8846508B1Method of implanting high aspect ratio featuresVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2013·Granted Sep 30, 2014·23 cites·18 claims
- 1595US7888249B2Use of chained implants in solar cellVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2010·Granted Feb 15, 2011·25 cites·20 claims
- 1695US7820460B2Patterned assembly for manufacturing a solar cell and a method thereofVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2008·Granted Oct 26, 2010·37 cites·28 claims
- 1795US7544958B2Contamination reduction during ion implantationVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2007·Granted Jun 9, 2009·30 cites·17 claims
- 1895US7446326B2Technique for improving ion implanter productivityVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2006·Granted Nov 4, 2008·29 cites·19 claims
- 1995US7176470B1Technique for high-efficiency ion implantationVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2005·Granted Feb 13, 2007·54 cites·15 claims
- 2095US6335536B1Method and apparatus for low voltage plasma doping using dual pulsesVARIAN SEMICONDUCTOR EQUIPMENT·Filed 1999·Granted Jan 1, 2002·101 cites·7 claims
- 2195US6182604B1Hollow cathode for plasma doping systemVARIAN SEMICONDUCTOR EQUIPMENT·Filed 1999·Granted Feb 6, 2001·133 cites·12 claims
- 2294US9287148B1Dynamic heating method and system for wafer processingVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2014·Granted Mar 15, 2016·17 cites·15 claims
- 2394US9082799B2System and method for 2D workpiece alignmentVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2012·Granted Jul 14, 2015·20 cites·12 claims
- 2494US7586100B2Closed loop control and process optimization in plasma doping processes using a time of flight ion detectorVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2008·Granted Sep 8, 2009·35 cites·25 claims
- 2594US6998625B1Ion implanter having two-stage deceleration beamlineVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2000·Granted Feb 14, 2006·58 cites·57 claims
- 2694US6777686B2Control system for indirectly heated cathode ion sourceVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2001·Granted Aug 17, 2004·61 cites·10 claims
- 2793US7544957B2Non-uniform ion implantationVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2006·Granted Jun 9, 2009·19 cites·12 claims
- 2893US7453059B2Technique for monitoring and controlling a plasma processVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2007·Granted Nov 18, 2008·21 cites·31 claims
- 2993US6791094B1Method and apparatus for determining beam parallelism and directionVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2000·Granted Sep 14, 2004·63 cites·25 claims
- 3093US6130436AAcceleration and analysis architecture for ion implanterVARIAN SEMICONDUCTOR EQUIPMENT·Filed 1998·Granted Oct 10, 2000·109 cites·32 claims
- 3192US9190498B2Technique for forming a FinFET device using selective ion implantationVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2013·Granted Nov 17, 2015·15 cites·7 claims
- 3292US7855087B2Floating sheet production apparatus and methodVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2009·Granted Dec 21, 2010·13 cites·20 claims
- 3392US7397048B2Technique for boron implantationVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2005·Granted Jul 8, 2008·23 cites·16 claims
- 3492US6580083B2High efficiency scanning in ion implantersVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2001·Granted Jun 17, 2003·41 cites·18 claims
- 3591US9061423B2Wafer handling apparatusVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2013·Granted Jun 23, 2015·11 cites·20 claims
- 3691US8759788B1Ion sourceVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2013·Granted Jun 24, 2014·15 cites·20 claims
- 3791US8497486B1Ion source having a shutter assemblyVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2012·Granted Jul 30, 2013·12 cites·13 claims
- 3891US7935942B2Technique for low-temperature ion implantationVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2006·Granted May 3, 2011·16 cites·19 claims
- 3991US7816239B2Technique for manufacturing a solar cellVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2009·Granted Oct 19, 2010·16 cites·15 claims
- 4091US7700925B2Techniques for providing a multimode ion sourceVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2007·Granted Apr 20, 2010·11 cites·14 claims
- 4191US7524743B2Conformal doping apparatus and methodVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2005·Granted Apr 28, 2009·22 cites·21 claims
- 4291US7126808B2Wafer platen equipped with electrostatic clamp, wafer backside gas cooling, and high voltage operation capability for plasma dopingVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2004·Granted Oct 24, 2006·69 cites·20 claims
- 4391US6748293B1Methods and apparatus for high speed object handlingVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2003·Granted Jun 8, 2004·67 cites·26 claims
- 4491US6300643B1Dose monitor for plasma doping systemVARIAN SEMICONDUCTOR EQUIPMENT·Filed 1999·Granted Oct 9, 2001·60 cites·23 claims
- 4590US9299564B2Ion implant for defect controlVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2013·Granted Mar 29, 2016·10 cites·17 claims
- 4690US8853653B1Apparatus and techniques for controlling ion implantation uniformityVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2013·Granted Oct 7, 2014·6 cites·16 claims
- 4790US7459704B2Ion source configuration for production of ionized clusters, ionized molecules and ionized mono-atomsVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2005·Granted Dec 2, 2008·17 cites·36 claims
- 4890US7253423B2Technique for uniformity tuning in an ion implanter systemVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2005·Granted Aug 7, 2007·14 cites·25 claims
- 4990US7138768B2Indirectly heated cathode ion sourceVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2002·Granted Nov 21, 2006·49 cites·29 claims
- 5090US7102139B2Source arc chamber for ion implanter having repeller electrode mounted to external insulatorVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2005·Granted Sep 5, 2006·14 cites·12 claims
Showing the top 50 of 470 patent records by PatentIndex Score.
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