Assignee
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC
US·339 granted patents·24 pending applications·628 citations·filing 2012–2023
Top patents by PatentIndex Score
363 records- 0197US11908691B2Techniques to engineer nanoscale patterned features using ionsVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2022·Granted Feb 20, 2024·3 cites·7 claims
- 0297US11488823B2Techniques to engineer nanoscale patterned features using ionsVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2021·Granted Nov 1, 2022·4 cites·19 claims
- 0397US9589802B1Damage free enhancement of dopant diffusion into a substrateVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2015·Granted Mar 7, 2017·28 cites·17 claims
- 0494US11043380B2Techniques to engineer nanoscale patterned features using ionsVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2018·Granted Jun 22, 2021·7 cites·10 claims
- 0594US10879055B2Techniques, system and apparatus for selective deposition of a layer using angled ionsVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2018·Granted Dec 29, 2020·12 cites·18 claims
- 0694US10651011B2Apparatus and techniques for generating bunched ion beamVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2018·Granted May 12, 2020·8 cites·17 claims
- 0794US10468226B1Extraction apparatus and system for high throughput ion beam processingVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2018·Granted Nov 5, 2019·15 cites·19 claims
- 0894US10403738B1Techniques for improved spacer in nanosheet deviceVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2018·Granted Sep 3, 2019·11 cites·20 claims
- 0994US9984889B2Techniques for manipulating patterned features using ionsVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2016·Granted May 29, 2018·11 cites·17 claims
- 1094US9706634B2Apparatus and techniques to treat substrates using directional plasma and reactive gasVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2015·Granted Jul 11, 2017·12 cites·14 claims
- 1194US9685298B1Apparatus and method for contamination control in ion beam apparatusVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2016·Granted Jun 20, 2017·13 cites·20 claims
- 1294US9589811B2FinFET spacer etch with no fin recess and no gate-spacer pull-downVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2015·Granted Mar 7, 2017·10 cites·16 claims
- 1393US11462546B2Dynamic random access device including two-dimensional array of fin structuresVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2020·Granted Oct 4, 2022·3 cites·14 claims
- 1493US10403552B1Replacement gate formation with angled etch and depositionVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2018·Granted Sep 3, 2019·7 cites·20 claims
- 1593US10141161B2Angle control for radicals and reactive neutral ion beamsVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2016·Granted Nov 27, 2018·13 cites·19 claims
- 1693US9978554B1Dual cathode ion sourceVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2017·Granted May 22, 2018·9 cites·19 claims
- 1793US9916966B1Apparatus and method for minimizing thermal distortion in electrodes used with ion sourcesVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2017·Granted Mar 13, 2018·9 cites·20 claims
- 1893US9691584B1Ion source for enhanced ionizationVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2016·Granted Jun 27, 2017·8 cites·19 claims
- 1993US9437397B2Textured silicon liners in substrate processing systemsVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2013·Granted Sep 6, 2016·5 cites·17 claims
- 2092US10325752B1Performance extraction setVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2018·Granted Jun 18, 2019·12 cites·19 claims
- 2192US10192727B2Electrodynamic mass analysisVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2017·Granted Jan 29, 2019·8 cites·19 claims
- 2292US10008384B2Techniques to engineer nanoscale patterned features using ionsVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2015·Granted Jun 26, 2018·6 cites·16 claims
- 2391US9666467B2Detachable high-temperature electrostatic chuck assemblyVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2014·Granted May 30, 2017·10 cites·21 claims
- 2491US9520284B1Ion beam activated directional depositionVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2015·Granted Dec 13, 2016·7 cites·19 claims
- 2590US11404254B2Insertable target holder for solid dopant materialsVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2019·Granted Aug 2, 2022·6 cites·12 claims
- 2690US10388745B1Structure and method of forming transistor device having improved gate contact arrangementVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2018·Granted Aug 20, 2019·6 cites·19 claims
- 2790US10276340B1Low particle capacitively coupled components for workpiece processingVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2017·Granted Apr 30, 2019·6 cites·18 claims
- 2890US9840772B2Method of improving ion beam quality in a non-mass-analyzed ion implantation systemVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2017·Granted Dec 12, 2017·2 cites·20 claims
- 2990US9818570B2Ion source for multiple charged speciesVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2015·Granted Nov 14, 2017·7 cites·20 claims
- 3090US9721750B2Controlling contamination particle trajectory from a beam-line electrostatic elementVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2015·Granted Aug 1, 2017·6 cites·19 claims
- 3190US9583308B1Light bath for particle suppressionVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2015·Granted Feb 28, 2017·6 cites·19 claims
- 3289US11069511B2System and methods using an inline surface engineering sourceVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2018·Granted Jul 20, 2021·4 cites·6 claims
- 3389US10685865B2Method and device for power rail in a fin type field effect transistorVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2018·Granted Jun 16, 2020·5 cites·18 claims
- 3489US10113917B2System and method for in situ temperature measurementVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2015·Granted Oct 30, 2018·4 cites·12 claims
- 3589US10068758B2Ion mass separation using RF extractionVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2017·Granted Sep 4, 2018·5 cites·17 claims
- 3689US10004133B2Apparatus and techniques to treat substrates using directional plasma and reactive gasVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2017·Granted Jun 19, 2018·5 cites·18 claims
- 3789US9997351B2Apparatus and techniques for filling a cavity using angled ion beamVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2015·Granted Jun 12, 2018·6 cites·14 claims
- 3889US9761410B2Apparatus and method for in-situ cleaning in ion beam apparatusVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2016·Granted Sep 12, 2017·5 cites·20 claims
- 3989US9478399B2Multi-aperture extraction system for angled ion beamVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2016·Granted Oct 25, 2016·5 cites·20 claims
- 4088US11402649B2System and method for optimally forming gratings of diffracted optical elementsVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2020·Granted Aug 2, 2022·2 cites·16 claims
- 4188US10310379B2Multiple patterning approach using ion implantationVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2017·Granted Jun 4, 2019·5 cites·18 claims
- 4288US9978556B2Parallelizing electrostatic acceleration/deceleration optical elementVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2015·Granted May 22, 2018·5 cites·8 claims
- 4388US9899193B1RF ion source with dynamic volume controlVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2016·Granted Feb 20, 2018·8 cites·19 claims
- 4488US9824846B2Dual material repellerVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2016·Granted Nov 21, 2017·5 cites·21 claims
- 4588US9659784B1Ion-assisted deposition and implantation of photoresist to improve line edge roughnessVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2015·Granted May 23, 2017·5 cites·16 claims
- 4688US9530615B2Techniques for improving the performance and extending the lifetime of an ion sourceVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2013·Granted Dec 27, 2016·9 cites·20 claims
- 4788US9514912B2Control of ion angular distribution of ion beams with hidden deflection electrodeVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2014·Granted Dec 6, 2016·9 cites·20 claims
- 4887US11127556B2Extraction apparatus and system for high throughput ion beam processingVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2019·Granted Sep 21, 2021·3 cites·17 claims
- 4987US11016228B2System and method for forming diffracted optical element having varied gratingsVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2020·Granted May 25, 2021·2 cites·20 claims
- 5087US9859098B2Temperature controlled ion sourceVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2015·Granted Jan 2, 2018·5 cites·17 claims
Showing the top 50 of 363 patent records by PatentIndex Score.
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