Assignee
VEECO CVC INC
US·3 granted patents·175 citations·filing 1998–2000
Top patents by PatentIndex Score
3 records- 0196US6488822B1Segmented-target ionized physical-vapor deposition apparatus and method of operationVEECO CVC INC·Filed 2000·Granted Dec 3, 2002·84 cites·40 claims
- 0294US6471830B1Inductively-coupled-plasma ionized physical-vapor deposition apparatus, method and systemVEECO CVC INC·Filed 2000·Granted Oct 29, 2002·71 cites·65 claims
- 0369US6592728B1Dual collimated deposition apparatus and method of useVEECO CVC INC·Filed 1998·Granted Jul 15, 2003·20 cites·3 claims
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