Assignee

VEECO METROLOGY INC

US·2 granted patents·5 citations·filing 2006–2008

Technology mixG01Q2 Y10S2 B82Y1 G01B1

Top patents by PatentIndex Score

2 records

0162US7578176B2Systems and methods for utilizing scanning probe shape characterizationVEECO METROLOGY INC·Filed 2006·Granted Aug 25, 2009·4 cites·36 claims
0248US7865966B2Method and apparatus of automatic scanning probe imagingVEECO METROLOGY INC·Filed 2008·Granted Jan 4, 2011·1 cites·31 claims

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