Assignee
VEECO PREC SURFACE PROC LLC
US·5 granted patents·1 pending application·11 citations·filing 2013–2017
Top patents by PatentIndex Score
6 records- 0177US9698062B2System and method for performing a wet etching processVEECO PREC SURFACE PROC LLC·Filed 2013·Granted Jul 4, 2017·6 cites·17 claims
- 0276US9541837B2Apparatus and method for removing challenging polymer films and structures from semiconductor wafersVEECO PREC SURFACE PROC LLC·Filed 2013·Granted Jan 10, 2017·5 cites·20 claims
- 0348US9694436B2System and method for flux coat, reflow and cleanVEECO PREC SURFACE PROC LLC·Filed 2014·Granted Jul 4, 2017·0 cites·17 claims
- 0446US9333446B2Apparatus and method to remove undissolved solids from post process dry film strip solventsVEECO PREC SURFACE PROC LLC·Filed 2013·Granted May 10, 2016·0 cites·21 claims
- 0537US9768041B2Collection chamber apparatus to separate multiple fluids during the semiconductor wafer processing cycleVEECO PREC SURFACE PROC LLC·Filed 2014·Granted Sep 19, 2017·0 cites·29 claims
- 0634US2017287768A1Apparatus and Method to Improve Plasma Dicing and Backmetal Cleaving ProcessVEECO PREC SURFACE PROC LLC·Filed 2017·Application pending·0 cites
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